Abstract
Extra low voltage D M S O 1technologies were developed using (1) modified MESA isolation without parasitic MOS operation, (2) dual gate CMOS for low Vth control, (3) optimized layout using both body-tied and floating body MOSFET’s, and (4)reduced Cb/Cs ratio. Completely redesigned low voltage scheme 16MDRAM/SOIwas successfullyrealized and functional operation was obtained at very low supply voltage below 1v.
Original language | English |
---|---|
Pages (from-to) | 609-612 |
Number of pages | 4 |
Journal | Technical Digest - International Electron Devices Meeting, IEDM |
DOIs | |
Publication status | Published - 1996 |
Externally published | Yes |
Event | Proceedings of the 1996 IEEE International Electron Devices Meeting - San Francisco, CA, USA Duration: 1996 Dec 8 → 1996 Dec 11 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry