Abstract
A 128Mbit FBRAM using the floating body cell(FBC) the size of 0.17μm2(6.24F2 with F-0.165μm) was successfully fabricated and a high bit yield(∼99.999%) was obtained.
Original language | English |
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Title of host publication | 2006 Symposium on VLSI Circuits, VLSIC - Digest of Technical Papers |
Pages | 180-181 |
Number of pages | 2 |
Publication status | Published - 2006 Dec 1 |
Externally published | Yes |
Event | 2006 Symposium on VLSI Circuits, VLSIC - Honolulu, HI, United States Duration: 2006 Jun 15 → 2006 Jun 17 |
Publication series
Name | IEEE Symposium on VLSI Circuits, Digest of Technical Papers |
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Other
Other | 2006 Symposium on VLSI Circuits, VLSIC |
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Country/Territory | United States |
City | Honolulu, HI |
Period | 06/6/15 → 06/6/17 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering