A 128Mb floating body RAM(FBRAM) on SOI with multi-averaging scheme of dummy cell

Takashi Ohsawa*, Tomoki Higashi, Katsuyuki Fujita, Kosuke Hatsuda, Nobuyuki Ikumi, Tomoaki Shino, Hiroomi Nakajima, Yoshihiro Minami, Naoki Kusunoki, Atsushi Sakamoto, Jun Nishimura, Takeshi Hamamoto, Shuso Fujii

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Citations (Scopus)

Abstract

A 128Mbit FBRAM using the floating body cell(FBC) the size of 0.17μm2(6.24F2 with F-0.165μm) was successfully fabricated and a high bit yield(∼99.999%) was obtained.

Original languageEnglish
Title of host publication2006 Symposium on VLSI Circuits, VLSIC - Digest of Technical Papers
Pages180-181
Number of pages2
Publication statusPublished - 2006 Dec 1
Externally publishedYes
Event2006 Symposium on VLSI Circuits, VLSIC - Honolulu, HI, United States
Duration: 2006 Jun 152006 Jun 17

Publication series

NameIEEE Symposium on VLSI Circuits, Digest of Technical Papers

Other

Other2006 Symposium on VLSI Circuits, VLSIC
Country/TerritoryUnited States
CityHonolulu, HI
Period06/6/1506/6/17

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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