A 3V operation RF MEMS variable capacitor using piezoelectric and electrostatic actuation with lithographical bending control

T. Ikehashi; E. Ogawa; H. Yamazaki; T. Ohguro

doi:10.1109/SENSOR.2007.4300093

A 3V operation RF MEMS variable capacitor using piezoelectric and electrostatic actuation with lithographical bending control

T. Ikehashi^*, E. Ogawa, H. Yamazaki, T. Ohguro

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

A 3V operation RF MEMS variable capacitor using hybrid actuation of piezoelectric and electrostatic forces is presented. Bending of the piezoelectric actuator is controlled by a lithographical pattern formed on top of the actuator. The hybrid actuation and the optimized bending enabled 2.6V pull-in voltage with the pull-out voltage as high as 2.0V. The measured capacitance ratio is 14.

Original language	English
Title of host publication	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	149-152
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2007.4300093
Publication status	Published - 2007 Dec 1
Externally published	Yes
Event	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France Duration: 2007 Jun 10 → 2007 Jun 14

Publication series

Name	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Country/Territory	France
City	Lyon
Period	07/6/10 → 07/6/14

Keywords

Bending
PZT
Piezoelectric
RF MEMS
Variable capacitor

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/SENSOR.2007.4300093

Cite this

Ikehashi, T., Ogawa, E., Yamazaki, H., & Ohguro, T. (2007). A 3V operation RF MEMS variable capacitor using piezoelectric and electrostatic actuation with lithographical bending control. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 149-152). Article 4300093 (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2007.4300093

A 3V operation RF MEMS variable capacitor using piezoelectric and electrostatic actuation with lithographical bending control. / Ikehashi, T.; Ogawa, E.; Yamazaki, H. et al.
TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 149-152 4300093 (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Ikehashi, T, Ogawa, E, Yamazaki, H & Ohguro, T 2007, A 3V operation RF MEMS variable capacitor using piezoelectric and electrostatic actuation with lithographical bending control. in TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems., 4300093, TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 149-152, 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, 07/6/10. https://doi.org/10.1109/SENSOR.2007.4300093

Ikehashi T, Ogawa E, Yamazaki H, Ohguro T. A 3V operation RF MEMS variable capacitor using piezoelectric and electrostatic actuation with lithographical bending control. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 149-152. 4300093. (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). doi: 10.1109/SENSOR.2007.4300093

Ikehashi, T. ; Ogawa, E. ; Yamazaki, H. et al. / A 3V operation RF MEMS variable capacitor using piezoelectric and electrostatic actuation with lithographical bending control. TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. pp. 149-152 (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems).

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A 3V operation RF MEMS variable capacitor using piezoelectric and electrostatic actuation with lithographical bending control

Abstract

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Conference

Keywords

ASJC Scopus subject areas

Access to Document

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