A CPW hybrid coupler with an enhanced coupling micro structure

Yusuke Kitsukawa*, Masatake Hangai, Sang Seok Lee, Tamotsu Nishino, Yukihisa Yoshida, Moriyasu Miyazaki

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)


A new micromachined coplanar waveguide (CPW) 3-dB hybrid coupler has been demonstrated. A micromachined enhanced coupling structure at the middle of two coupled transmission lines is employed to obtain high directivity. The coupling structure is composed of alternately overlapping plated conductors employing micromachined air-gap structures. This structure relaxes the tolerance of the gap between the coupled transmission lines, and mitigates production error. Moreover, this coupling structure enhances the coupler directivity by equalizing phase velocities of both evenand odd modes. We fabricate the CPW hybrid coupler with the enhanced coupling structure on a silicon substrate to verify the performance. The results showed the return loss of better than 28dB, the isolation of more than 25dB over 11 to 15 GHz.

Original languageEnglish
Title of host publication2006 Asia-Pacific Microwave Conference Proceedings, APMC
Number of pages4
Publication statusPublished - 2006
Externally publishedYes
Event2006 Asia-Pacific Microwave Conference, APMC - Yokohama, Japan
Duration: 2006 Dec 122006 Dec 15

Publication series

NameAsia-Pacific Microwave Conference Proceedings, APMC


Other2006 Asia-Pacific Microwave Conference, APMC


  • Air-gap
  • CPW
  • Directional coupler
  • MEMS

ASJC Scopus subject areas

  • General Engineering


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