A creep-immune electrostatic actuator for RF-MEMS tunable capacitor

Etsuji Ogawa*, Tamio Ikehashi, Tomohiro Saito, Hiroaki Yamazaki, Kei Masunishi, Yasushi Tomizawa, Tatsuya Ohguro, Yoshiaki Sugizaki, Yoshiaki Toyoshima, Hideki Shibata

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)


A high creep-immunity MEMS actuator is proposed for RF-MEMS tunable capacitor. The creep-immunity is attained using silicon nitride, SiN, for the spring portions, where the stress is concentrated. Compared with an aluminum spring, the creep-induced deformation is reduced by a factor of 23 at 100 °C. We also confirmed by a billion cycle test that the SiN spring does not develop a brittle fracture.

Original languageEnglish
Pages (from-to)373-377
Number of pages5
JournalSensors and Actuators, A: Physical
Issue number2
Publication statusPublished - 2011 Oct
Externally publishedYes


  • Brittle material
  • Creep
  • Electrostatic actuator
  • Tunable capacitor

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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