A creep-immune electrostatic actuator for RF-MEMS tunable capacitor

Etsuji Ogawa; Tamio Ikehashi; Tomohiro Saito; Hiroaki Yamazaki; Kei Masunishi; Yasushi Tomizawa; Tatsuya Ohguro; Yoshiaki Sugizaki; Yoshiaki Toyoshima; Hideki Shibata

doi:10.1016/j.sna.2011.04.014

A creep-immune electrostatic actuator for RF-MEMS tunable capacitor

Etsuji Ogawa^*, Tamio Ikehashi, Tomohiro Saito, Hiroaki Yamazaki, Kei Masunishi, Yasushi Tomizawa, Tatsuya Ohguro, Yoshiaki Sugizaki, Yoshiaki Toyoshima, Hideki Shibata

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

A high creep-immunity MEMS actuator is proposed for RF-MEMS tunable capacitor. The creep-immunity is attained using silicon nitride, SiN, for the spring portions, where the stress is concentrated. Compared with an aluminum spring, the creep-induced deformation is reduced by a factor of 23 at 100 °C. We also confirmed by a billion cycle test that the SiN spring does not develop a brittle fracture.

Original language	English
Pages (from-to)	373-377
Number of pages	5
Journal	Sensors and Actuators, A: Physical
Volume	169
Issue number	2
DOIs	https://doi.org/10.1016/j.sna.2011.04.014
Publication status	Published - 2011 Oct
Externally published	Yes

Keywords

Brittle material
Creep
Electrostatic actuator
RF-MEMS
Tunable capacitor

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/j.sna.2011.04.014

Cite this

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title = "A creep-immune electrostatic actuator for RF-MEMS tunable capacitor",

abstract = "A high creep-immunity MEMS actuator is proposed for RF-MEMS tunable capacitor. The creep-immunity is attained using silicon nitride, SiN, for the spring portions, where the stress is concentrated. Compared with an aluminum spring, the creep-induced deformation is reduced by a factor of 23 at 100 °C. We also confirmed by a billion cycle test that the SiN spring does not develop a brittle fracture.",

keywords = "Brittle material, Creep, Electrostatic actuator, RF-MEMS, Tunable capacitor",

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T1 - A creep-immune electrostatic actuator for RF-MEMS tunable capacitor

AU - Ogawa, Etsuji

AU - Ikehashi, Tamio

AU - Saito, Tomohiro

AU - Yamazaki, Hiroaki

AU - Masunishi, Kei

AU - Tomizawa, Yasushi

AU - Ohguro, Tatsuya

AU - Sugizaki, Yoshiaki

AU - Toyoshima, Yoshiaki

AU - Shibata, Hideki

PY - 2011/10

Y1 - 2011/10

N2 - A high creep-immunity MEMS actuator is proposed for RF-MEMS tunable capacitor. The creep-immunity is attained using silicon nitride, SiN, for the spring portions, where the stress is concentrated. Compared with an aluminum spring, the creep-induced deformation is reduced by a factor of 23 at 100 °C. We also confirmed by a billion cycle test that the SiN spring does not develop a brittle fracture.

AB - A high creep-immunity MEMS actuator is proposed for RF-MEMS tunable capacitor. The creep-immunity is attained using silicon nitride, SiN, for the spring portions, where the stress is concentrated. Compared with an aluminum spring, the creep-induced deformation is reduced by a factor of 23 at 100 °C. We also confirmed by a billion cycle test that the SiN spring does not develop a brittle fracture.

KW - Brittle material

KW - Creep

KW - Electrostatic actuator

KW - RF-MEMS

KW - Tunable capacitor

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A creep-immune electrostatic actuator for RF-MEMS tunable capacitor

Abstract

Keywords

ASJC Scopus subject areas

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