A disposable, dead volume-free and leak-free in-plane PDMS microvalve

Jeung Sang Go*, Shuichi Shoji

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

58 Citations (Scopus)


The align-less three-dimensional in-plane PDMS microvalve is presented. The device is entirely made from PDMS. The hemisphere with smooth surface ensures dead volume- and leak-free, which is formed by bulging of UV-curable glue. Also, the spin-coated PDMS membrane is bonded to the molded PDMS substrate for 3D structure fabrication indicating that align-less assembly is possible. In particular, the curing ratio, defined as the ratio of soft cure time and the full cure time of PDMS at the soft cure temperature, is for the first time introduced for PDMS-to-PDMS bonding. The best bonding judged from bonding feature and bonding strength is shown at the temperature of 50°C and 29min implying the curing ratio of 0.06. Finally, a membrane-inserted in-plane PDMS microvalve is fabricated and its performance is visually evaluated.

Original languageEnglish
Pages (from-to)438-444
Number of pages7
JournalSensors and Actuators, A: Physical
Issue number2-3
Publication statusPublished - 2004 Sept 1
EventSelected Papers from Transducers 03 - Boston, MA, United States
Duration: 2003 Jun 82003 Jun 12


  • Curing ratio
  • Microvalve
  • PDMS membrane
  • PDMS-to-PDMS bonding
  • UV-curable glue

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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