A high sensitivity MEMS gravimeter with electrically tunable stiffness

Chengzhi Yi*, Jun Wu, Tamio Ikehashi

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper reports on a high sensitivity capacitive micro-electromechanical systems (MEMS) gravimeter. The high sensitivity is achieved by the low resonant frequency structure and large sensing capacitance. An electrical tuning method was employed to reduce the stiffness. The resulting resonance frequency was as small as 1Hz. To attain the large capacitance, a through-silicon Deep-RIE method was applied to a 525μm thick silicon layer. A cascaded demodulation method is adopted in the readout circuit. This capacitive gravimeter demonstrated a sensitivity of 293 pF/g. The voltage sensitivity is 0.96 VGal. The gravimeter has a noise floor of 0.8μ Gal Hz.

Original languageEnglish
Title of host publicationINERTIAL 2024 - 11th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9798350316698
DOIs
Publication statusPublished - 2024
Event11th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2024 - Hiroshima, Japan
Duration: 2024 Mar 252024 Mar 28

Publication series

NameINERTIAL 2024 - 11th IEEE International Symposium on Inertial Sensors and Systems, Proceedings

Conference

Conference11th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2024
Country/TerritoryJapan
CityHiroshima
Period24/3/2524/3/28

Keywords

  • MEMS
  • electrical tuning
  • gravimeter

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Control and Optimization
  • Modelling and Simulation
  • Instrumentation

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