TY - GEN
T1 - A high sensitivity MEMS gravimeter with electrically tunable stiffness
AU - Yi, Chengzhi
AU - Wu, Jun
AU - Ikehashi, Tamio
N1 - Publisher Copyright:
© 2024 IEEE.
PY - 2024
Y1 - 2024
N2 - This paper reports on a high sensitivity capacitive micro-electromechanical systems (MEMS) gravimeter. The high sensitivity is achieved by the low resonant frequency structure and large sensing capacitance. An electrical tuning method was employed to reduce the stiffness. The resulting resonance frequency was as small as 1Hz. To attain the large capacitance, a through-silicon Deep-RIE method was applied to a 525μm thick silicon layer. A cascaded demodulation method is adopted in the readout circuit. This capacitive gravimeter demonstrated a sensitivity of 293 pF/g. The voltage sensitivity is 0.96 VGal. The gravimeter has a noise floor of 0.8μ Gal Hz.
AB - This paper reports on a high sensitivity capacitive micro-electromechanical systems (MEMS) gravimeter. The high sensitivity is achieved by the low resonant frequency structure and large sensing capacitance. An electrical tuning method was employed to reduce the stiffness. The resulting resonance frequency was as small as 1Hz. To attain the large capacitance, a through-silicon Deep-RIE method was applied to a 525μm thick silicon layer. A cascaded demodulation method is adopted in the readout circuit. This capacitive gravimeter demonstrated a sensitivity of 293 pF/g. The voltage sensitivity is 0.96 VGal. The gravimeter has a noise floor of 0.8μ Gal Hz.
KW - MEMS
KW - electrical tuning
KW - gravimeter
UR - http://www.scopus.com/inward/record.url?scp=85192026733&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85192026733&partnerID=8YFLogxK
U2 - 10.1109/INERTIAL60399.2024.10502072
DO - 10.1109/INERTIAL60399.2024.10502072
M3 - Conference contribution
AN - SCOPUS:85192026733
T3 - INERTIAL 2024 - 11th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
BT - INERTIAL 2024 - 11th IEEE International Symposium on Inertial Sensors and Systems, Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 11th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2024
Y2 - 25 March 2024 through 28 March 2024
ER -