A kinetic study of the chemical vapor deposition of silicon carbide from dichlorodimethylsilane precursors

Physics & Astronomy

• silicon carbides 82%
• vapor deposition 65%
• vapor phases 51%
• kinetics 51%
• mass transfer 38%
• chemistry 36%
• polymerization 20%
• fission 19%
• chemical reactions 19%
• atmospheric pressure 19%
• decomposition 16%
• gases 11%
• temperature 6%

Chemical Compounds

• Silicon Carbide 95%
• Chemical Vapour Deposition 77%
• Mass Transfer 47%
• Chemistry 33%
• Fission 32%
• Reaction Path 30%
• Surface 27%
• Polymerization Reaction 17%
• Pressure 16%
• Gas 15%
• Liquid Film 13%

Engineering & Materials Science

• Chemical vapor deposition 100%
• Silicon carbide 92%
• Gases 49%
• Mass transfer 38%
• Fission reactions 33%
• Polymerization 24%
• Atmospheric pressure 24%
• Chemical reactions 21%
• Decomposition 15%
• Temperature 8%