A long-term reliability analysis of a creep-immune RF-MEMS tunable capacitor

Etsuji Ogawa^*, Kei Masunishi, Tamio Ikehashi, Tomohiro Saito, Hiroaki Yamazaki, Yasushi Tomizawa, Yoshiaki Sugizaki

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution