A MEMS rate integrating gyroscope based on catch-and-release mechanism for low-noise continuous angle measurement

Ryunosuke Gando; Shunta Maeda; Kei Masunishi; Yasushi Tomizawa; Etsuji Ogawa; Yohei Hatakeyama; Tetsuro Itakura; Tamio Ikehashi

doi:10.1109/MEMSYS.2018.8346713

A MEMS rate integrating gyroscope based on catch-and-release mechanism for low-noise continuous angle measurement

Ryunosuke Gando^*, Shunta Maeda, Kei Masunishi, Yasushi Tomizawa, Etsuji Ogawa, Yohei Hatakeyama, Tetsuro Itakura, Tamio Ikehashi

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

23 Citations (Scopus)

Abstract

We present two new techniques effective in realizing high precision MEMS Rate Integrating Gyroscope (RIG). First one is the application of the Catch-and-Release (CR) scheme, reported previously, to the RIG. We show that continuous angle measurement can be attained by catching and releasing a pair of CR-RIGs in a complementary manner. Direct angle measurement is also demonstrated by adopting a doughnut-shaped CR-RIG. Second one is a resistive tunable damper that can compensate the damping asymmetry, a major cause of the angle drift. In this tunable damper, the mechanical damping factor can be tuned by resistance and voltage. We show that the theoretical model fits well with the experimental results.

Original language	English
Title of host publication	2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	944-947
Number of pages	4
ISBN (Electronic)	9781538647820
DOIs	https://doi.org/10.1109/MEMSYS.2018.8346713
Publication status	Published - 2018 Apr 24
Externally published	Yes
Event	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom Duration: 2018 Jan 21 → 2018 Jan 25

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2018-January
ISSN (Print)	1084-6999

Other

Other	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Country/Territory	United Kingdom
City	Belfast
Period	18/1/21 → 18/1/25

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2018.8346713

Cite this

Gando, R., Maeda, S., Masunishi, K., Tomizawa, Y., Ogawa, E., Hatakeyama, Y., Itakura, T., & Ikehashi, T. (2018). A MEMS rate integrating gyroscope based on catch-and-release mechanism for low-noise continuous angle measurement. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (pp. 944-947). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346713

A MEMS rate integrating gyroscope based on catch-and-release mechanism for low-noise continuous angle measurement. / Gando, Ryunosuke; Maeda, Shunta; Masunishi, Kei et al.
2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 944-947 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Gando, R, Maeda, S, Masunishi, K, Tomizawa, Y, Ogawa, E, Hatakeyama, Y, Itakura, T & Ikehashi, T 2018, A MEMS rate integrating gyroscope based on catch-and-release mechanism for low-noise continuous angle measurement. in 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2018-January, Institute of Electrical and Electronics Engineers Inc., pp. 944-947, 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom, 18/1/21. https://doi.org/10.1109/MEMSYS.2018.8346713

Gando R, Maeda S, Masunishi K, Tomizawa Y, Ogawa E, Hatakeyama Y et al. A MEMS rate integrating gyroscope based on catch-and-release mechanism for low-noise continuous angle measurement. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc. 2018. p. 944-947. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2018.8346713

Gando, Ryunosuke ; Maeda, Shunta ; Masunishi, Kei et al. / A MEMS rate integrating gyroscope based on catch-and-release mechanism for low-noise continuous angle measurement. 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 944-947 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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abstract = "We present two new techniques effective in realizing high precision MEMS Rate Integrating Gyroscope (RIG). First one is the application of the Catch-and-Release (CR) scheme, reported previously, to the RIG. We show that continuous angle measurement can be attained by catching and releasing a pair of CR-RIGs in a complementary manner. Direct angle measurement is also demonstrated by adopting a doughnut-shaped CR-RIG. Second one is a resistive tunable damper that can compensate the damping asymmetry, a major cause of the angle drift. In this tunable damper, the mechanical damping factor can be tuned by resistance and voltage. We show that the theoretical model fits well with the experimental results.",

author = "Ryunosuke Gando and Shunta Maeda and Kei Masunishi and Yasushi Tomizawa and Etsuji Ogawa and Yohei Hatakeyama and Tetsuro Itakura and Tamio Ikehashi",

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AU - Ogawa, Etsuji

AU - Hatakeyama, Yohei

AU - Itakura, Tetsuro

AU - Ikehashi, Tamio

N1 - Funding Information: This work is partially based on the results obtained from a project commissioned by the New Energy and Industrial Technology Development Organization (NEDO). The authors would like to thank H. Shibata and Y. Sugizaki for the supports and the encouragements. Publisher Copyright: © 2018 IEEE.

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N2 - We present two new techniques effective in realizing high precision MEMS Rate Integrating Gyroscope (RIG). First one is the application of the Catch-and-Release (CR) scheme, reported previously, to the RIG. We show that continuous angle measurement can be attained by catching and releasing a pair of CR-RIGs in a complementary manner. Direct angle measurement is also demonstrated by adopting a doughnut-shaped CR-RIG. Second one is a resistive tunable damper that can compensate the damping asymmetry, a major cause of the angle drift. In this tunable damper, the mechanical damping factor can be tuned by resistance and voltage. We show that the theoretical model fits well with the experimental results.

AB - We present two new techniques effective in realizing high precision MEMS Rate Integrating Gyroscope (RIG). First one is the application of the Catch-and-Release (CR) scheme, reported previously, to the RIG. We show that continuous angle measurement can be attained by catching and releasing a pair of CR-RIGs in a complementary manner. Direct angle measurement is also demonstrated by adopting a doughnut-shaped CR-RIG. Second one is a resistive tunable damper that can compensate the damping asymmetry, a major cause of the angle drift. In this tunable damper, the mechanical damping factor can be tuned by resistance and voltage. We show that the theoretical model fits well with the experimental results.

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A MEMS rate integrating gyroscope based on catch-and-release mechanism for low-noise continuous angle measurement

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