Abstract
The fabrication of a three-way valve on a silicon wafer by micromachining techniques is presented. The valve consists of two silicon wafers, a pyrex glass, and a piezoelectric actuator. This three-way valve can control gas flow or liquid flow with voltage applied to the actuator. The liquid flow can be controlled from 0.1 μ1/min to 70 μ1/min. The results from integrating the three-way valve with a micropump to produce a flow injection analyzing system are discussed.
| Original language | English |
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| Pages | 89-94 |
| Number of pages | 6 |
| Publication status | Published - 1990 |
| Externally published | Yes |
| Event | Proceedings - IEEE Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Napa Valley, CA, USA Duration: 1990 Feb 11 → 1990 Feb 14 |
Other
| Other | Proceedings - IEEE Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots |
|---|---|
| City | Napa Valley, CA, USA |
| Period | 90/2/11 → 90/2/14 |
ASJC Scopus subject areas
- General Engineering