A New Ion Counting System Devised for Mass-Selective Detection of Sputtered Neutrals in Laser SNMS

Shingo Ichimura; Keisuke Goto; Kiyohide Kokubun; Hazime Shimizu; Shigeki Matsuura

doi:10.1143/JJAP.29.L1209

A New Ion Counting System Devised for Mass-Selective Detection of Sputtered Neutrals in Laser SNMS

Shingo Ichimura^*, Keisuke Goto, Kiyohide Kokubun, Hazime Shimizu, Shigeki Matsuura

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

A new ion counting system was devised for time-of-flight mass detection in sputtered neutral mass spectrometry (SNMS), using a pulse laser for postionization. A microchannel plate (MCP) intensifier used as a detector was gated by a retarding grid in front of the MCP for particular masses. High peak-counting ability (exceeding 10¹⁰ counts per second) of the system for ionization with a laser pulse (20–30 ns) was maintained for mass-selective detection. The performance of the new counting system at a high count rate was analyzed, and the detection limit and the accuracy were discussed.

Original language	English
Pages (from-to)	L1209-L1212
Journal	Japanese journal of applied physics
Volume	29
Issue number	7
DOIs	https://doi.org/10.1143/JJAP.29.L1209
Publication status	Published - 1990 Jul
Externally published	Yes

Keywords

Counting
Image processing
Laser
Postionization
Snms
Time of flight

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/JJAP.29.L1209

Cite this

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title = "A New Ion Counting System Devised for Mass-Selective Detection of Sputtered Neutrals in Laser SNMS",

abstract = "A new ion counting system was devised for time-of-flight mass detection in sputtered neutral mass spectrometry (SNMS), using a pulse laser for postionization. A microchannel plate (MCP) intensifier used as a detector was gated by a retarding grid in front of the MCP for particular masses. High peak-counting ability (exceeding 1010 counts per second) of the system for ionization with a laser pulse (20–30 ns) was maintained for mass-selective detection. The performance of the new counting system at a high count rate was analyzed, and the detection limit and the accuracy were discussed.",

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author = "Shingo Ichimura and Keisuke Goto and Kiyohide Kokubun and Hazime Shimizu and Shigeki Matsuura",

year = "1990",

month = jul,

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T1 - A New Ion Counting System Devised for Mass-Selective Detection of Sputtered Neutrals in Laser SNMS

AU - Ichimura, Shingo

AU - Goto, Keisuke

AU - Kokubun, Kiyohide

AU - Shimizu, Hazime

AU - Matsuura, Shigeki

PY - 1990/7

Y1 - 1990/7

N2 - A new ion counting system was devised for time-of-flight mass detection in sputtered neutral mass spectrometry (SNMS), using a pulse laser for postionization. A microchannel plate (MCP) intensifier used as a detector was gated by a retarding grid in front of the MCP for particular masses. High peak-counting ability (exceeding 1010 counts per second) of the system for ionization with a laser pulse (20–30 ns) was maintained for mass-selective detection. The performance of the new counting system at a high count rate was analyzed, and the detection limit and the accuracy were discussed.

AB - A new ion counting system was devised for time-of-flight mass detection in sputtered neutral mass spectrometry (SNMS), using a pulse laser for postionization. A microchannel plate (MCP) intensifier used as a detector was gated by a retarding grid in front of the MCP for particular masses. High peak-counting ability (exceeding 1010 counts per second) of the system for ionization with a laser pulse (20–30 ns) was maintained for mass-selective detection. The performance of the new counting system at a high count rate was analyzed, and the detection limit and the accuracy were discussed.

KW - Counting

KW - Image processing

KW - Laser

KW - Postionization

KW - Snms

KW - Time of flight

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A New Ion Counting System Devised for Mass-Selective Detection of Sputtered Neutrals in Laser SNMS

Abstract

Keywords

ASJC Scopus subject areas

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