A new method for cleaning the surface of ultra high-purity iron by high-purity ozone exposure and UV irradiation

Shigeru Suzuki; Shingo Ichimura; Akira Kurokawa; Yukio Ishikawa; Minoru Isshiki; Yoshio Waseda

doi:10.2320/matertrans1989.38.451

A new method for cleaning the surface of ultra high-purity iron by high-purity ozone exposure and UV irradiation

Shigeru Suzuki^*, Shingo Ichimura, Akira Kurokawa, Yukio Ishikawa, Minoru Isshiki, Yoshio Waseda

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

A new method by applying high-purity ozone exposure and ultraviolet (UV) irradiation has been used for cleaning the surface of ultra high-purity iron with a carbon contaminated layer. The amount and chemical state of elements on the specimen surface were characterized by X-ray photoelectron spectroscopy. The intensity of the C 1s XPS peak due to carbon contamination was found to decrease with increasing ozone exposure at room temperature. UV irradiation during ozone exposure enhanced the cleaning rate. The XPS results show that contaminated carbon is mainly classified into major aliphatic carbon and minor carboxyl carbon, and their ratio depends upon the condition of ozone exposure. The role of ozone exposure and UV irradiation was discussed with respect to surface cleaning.

Original language	English
Pages (from-to)	451-456
Number of pages	6
Journal	Materials Transactions, JIM
Volume	38
Issue number	5
DOIs	https://doi.org/10.2320/matertrans1989.38.451
Publication status	Published - 1997 May
Externally published	Yes

Keywords

Oxidation
Ozone
Surface cleaning
Ultra high-purity iron
X-ray photoelectron spectroscopy

ASJC Scopus subject areas

Engineering(all)

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10.2320/matertrans1989.38.451

Cite this

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abstract = "A new method by applying high-purity ozone exposure and ultraviolet (UV) irradiation has been used for cleaning the surface of ultra high-purity iron with a carbon contaminated layer. The amount and chemical state of elements on the specimen surface were characterized by X-ray photoelectron spectroscopy. The intensity of the C 1s XPS peak due to carbon contamination was found to decrease with increasing ozone exposure at room temperature. UV irradiation during ozone exposure enhanced the cleaning rate. The XPS results show that contaminated carbon is mainly classified into major aliphatic carbon and minor carboxyl carbon, and their ratio depends upon the condition of ozone exposure. The role of ozone exposure and UV irradiation was discussed with respect to surface cleaning.",

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AU - Suzuki, Shigeru

AU - Ichimura, Shingo

AU - Kurokawa, Akira

AU - Ishikawa, Yukio

AU - Isshiki, Minoru

AU - Waseda, Yoshio

PY - 1997/5

Y1 - 1997/5

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AB - A new method by applying high-purity ozone exposure and ultraviolet (UV) irradiation has been used for cleaning the surface of ultra high-purity iron with a carbon contaminated layer. The amount and chemical state of elements on the specimen surface were characterized by X-ray photoelectron spectroscopy. The intensity of the C 1s XPS peak due to carbon contamination was found to decrease with increasing ozone exposure at room temperature. UV irradiation during ozone exposure enhanced the cleaning rate. The XPS results show that contaminated carbon is mainly classified into major aliphatic carbon and minor carboxyl carbon, and their ratio depends upon the condition of ozone exposure. The role of ozone exposure and UV irradiation was discussed with respect to surface cleaning.

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KW - Ozone

KW - Surface cleaning

KW - Ultra high-purity iron

KW - X-ray photoelectron spectroscopy

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A new method for cleaning the surface of ultra high-purity iron by high-purity ozone exposure and UV irradiation

Abstract

Keywords

ASJC Scopus subject areas

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