Abstract
We built a new type ozone killer based on the redox reactions between cuprous and cupric oxides and applied it to the decomposition of low-pressure highly concentrated ozone. The analysis of the exhaust gas from the ozone killer by low-temperature thermal desorption measurement shows that ozone flux of 1.6 PaLs-1 can be decomposed completely to oxygen when the copper fins in the ozone killer were heated to 470°C. The copper fins, however, must be kept at even higher temperatures to decompose continuous and larger-flux of ozone since the oxidation of the fins turned out to proceed into the bulk at 470°C.
Original language | English |
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Pages (from-to) | 221-224 |
Number of pages | 4 |
Journal | Shinku/Journal of the Vacuum Society of Japan |
Volume | 44 |
Issue number | 3 |
DOIs | |
Publication status | Published - 2001 |
Externally published | Yes |
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering