A new ozone decomposition method using redox reactions of transition metals

H. Nonaka*, A. Kurokawa, S. Ichimura, T. Nishiguchi, Y. Morikawa, M. Miyamoto

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


We built a new type ozone killer based on the redox reactions between cuprous and cupric oxides and applied it to the decomposition of low-pressure highly concentrated ozone. The analysis of the exhaust gas from the ozone killer by low-temperature thermal desorption measurement shows that ozone flux of 1.6 PaLs-1 can be decomposed completely to oxygen when the copper fins in the ozone killer were heated to 470°C. The copper fins, however, must be kept at even higher temperatures to decompose continuous and larger-flux of ozone since the oxidation of the fins turned out to proceed into the bulk at 470°C.

Original languageEnglish
Pages (from-to)221-224
Number of pages4
JournalShinku/Journal of the Vacuum Society of Japan
Issue number3
Publication statusPublished - 2001
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering


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