We built a new type ozone killer based on the redox reactions between cuprous and cupric oxides and applied it to the decomposition of low-pressure highly concentrated ozone. The analysis of the exhaust gas from the ozone killer by low-temperature thermal desorption measurement shows that ozone flux of 1.6 PaLs-1 can be decomposed completely to oxygen when the copper fins in the ozone killer were heated to 470°C. The copper fins, however, must be kept at even higher temperatures to decompose continuous and larger-flux of ozone since the oxidation of the fins turned out to proceed into the bulk at 470°C.
|Number of pages||4|
|Journal||Shinku/Journal of the Vacuum Society of Japan|
|Publication status||Published - 2001|
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering