A novel fabrication of in-channel 3-D micromesh structure using maskless multi-angle exposure and its microfilter application

Hironobu Sato; Takayuki Kakinuma; Jeung Sang Go; Shuichi Shoji

A novel fabrication of in-channel 3-D micromesh structure using maskless multi-angle exposure and its microfilter application

Hironobu Sato^*, Takayuki Kakinuma, Jeung Sang Go, Shuichi Shoji

^*Corresponding author for this work

School of Fundamental Science and Engineering

Research output: Contribution to conference › Paper › peer-review

44 Citations (Scopus)

Abstract

This paper presents a novel fabrication method of in-channel three-dimensional micromesh structures using the conventional photolithography. The micromesh was realized by exposing UV light from the backside of the SU-8 coated metal-patterned glass substrate for different angles. Numbers of exposure and irradiation angle decided the shape and the size of micromesh. Based on this technique, three different micromesh-inserted microchannel structures were fabricated. For hydrodynamic characterization, their flow resistances were measured. Finally, for the application of Micro Total Analysis System (μTAS), the microfilter was fabricated and its filtering property was demonstrated.

Original language	English
Pages	223-226
Number of pages	4
Publication status	Published - 2003 Jul 23
Event	IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan Duration: 2003 Jan 19 → 2003 Jan 23

Conference

Conference	IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems
Country/Territory	Japan
City	Kyoto
Period	03/1/19 → 03/1/23

ASJC Scopus subject areas

Control and Systems Engineering
Mechanical Engineering
Electrical and Electronic Engineering

Cite this

A novel fabrication of in-channel 3-D micromesh structure using maskless multi-angle exposure and its microfilter application. / Sato, Hironobu; Kakinuma, Takayuki; Go, Jeung Sang et al.
2003. 223-226 Paper presented at IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, Kyoto, Japan.

Research output: Contribution to conference › Paper › peer-review

@conference{b4c4f21f938b453abc682795299e1ca9,

title = "A novel fabrication of in-channel 3-D micromesh structure using maskless multi-angle exposure and its microfilter application",

abstract = "This paper presents a novel fabrication method of in-channel three-dimensional micromesh structures using the conventional photolithography. The micromesh was realized by exposing UV light from the backside of the SU-8 coated metal-patterned glass substrate for different angles. Numbers of exposure and irradiation angle decided the shape and the size of micromesh. Based on this technique, three different micromesh-inserted microchannel structures were fabricated. For hydrodynamic characterization, their flow resistances were measured. Finally, for the application of Micro Total Analysis System (μTAS), the microfilter was fabricated and its filtering property was demonstrated.",

author = "Hironobu Sato and Takayuki Kakinuma and Go, {Jeung Sang} and Shuichi Shoji",

year = "2003",

month = jul,

day = "23",

language = "English",

pages = "223--226",

note = "IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems ; Conference date: 19-01-2003 Through 23-01-2003",

}

TY - CONF

T1 - A novel fabrication of in-channel 3-D micromesh structure using maskless multi-angle exposure and its microfilter application

AU - Sato, Hironobu

AU - Kakinuma, Takayuki

AU - Go, Jeung Sang

AU - Shoji, Shuichi

PY - 2003/7/23

Y1 - 2003/7/23

N2 - This paper presents a novel fabrication method of in-channel three-dimensional micromesh structures using the conventional photolithography. The micromesh was realized by exposing UV light from the backside of the SU-8 coated metal-patterned glass substrate for different angles. Numbers of exposure and irradiation angle decided the shape and the size of micromesh. Based on this technique, three different micromesh-inserted microchannel structures were fabricated. For hydrodynamic characterization, their flow resistances were measured. Finally, for the application of Micro Total Analysis System (μTAS), the microfilter was fabricated and its filtering property was demonstrated.

AB - This paper presents a novel fabrication method of in-channel three-dimensional micromesh structures using the conventional photolithography. The micromesh was realized by exposing UV light from the backside of the SU-8 coated metal-patterned glass substrate for different angles. Numbers of exposure and irradiation angle decided the shape and the size of micromesh. Based on this technique, three different micromesh-inserted microchannel structures were fabricated. For hydrodynamic characterization, their flow resistances were measured. Finally, for the application of Micro Total Analysis System (μTAS), the microfilter was fabricated and its filtering property was demonstrated.

UR - http://www.scopus.com/inward/record.url?scp=0037480719&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0037480719&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0037480719

SP - 223

EP - 226

T2 - IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems

Y2 - 19 January 2003 through 23 January 2003

ER -

A novel fabrication of in-channel 3-D micromesh structure using maskless multi-angle exposure and its microfilter application

Abstract

Conference

ASJC Scopus subject areas

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