Abstract
Using quartz micromachining, a compact galvanometer for optical scanning in a laser printer (LP) is developed. The merits of the device are compact size (24 mm × 24 mm × 14 mm), large scan angle (a 70° peak-to-peak effective optical angle), high speed scanning (a speed of 840 scans per second), and a structure suitable for mass production. The features of the galvanometer were evaluated and it was found that the jitter is less than 0.03%, the wobble is less than 90 μrad, and the stability of the scan angle over a temperature range of 5 to 50°C was less than a 0.5% change. These values satisfy the specifications of optical scanning in a LP.
Original language | English |
---|---|
Title of host publication | Transducers '91 |
Place of Publication | Piscataway, NJ, United States |
Publisher | Publ by IEEE |
Pages | 734-737 |
Number of pages | 4 |
ISBN (Print) | 0879425857 |
Publication status | Published - 1991 |
Event | 1991 International Conference on Solid-State Sensors and Actuators - San Francisco, CA, USA Duration: 1991 Jun 24 → 1991 Jun 28 |
Other
Other | 1991 International Conference on Solid-State Sensors and Actuators |
---|---|
City | San Francisco, CA, USA |
Period | 91/6/24 → 91/6/28 |
ASJC Scopus subject areas
- Engineering(all)