A review of capacitive MEMS hydrogen sensor using Pd-based metallic glass with fast response and low power consumption

Hiroaki Yamazaki; Yumi Hayashi; Kei Masunishi; Daiki Ono; Tamio Ikehashi

doi:10.1002/ecj.12139

A review of capacitive MEMS hydrogen sensor using Pd-based metallic glass with fast response and low power consumption

Hiroaki Yamazaki^*, Yumi Hayashi, Kei Masunishi, Daiki Ono, Tamio Ikehashi

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

14 Citations (Scopus)

Abstract

This paper reports on a capacitive MEMS hydrogen sensor using Pd-based metallic glass (MG) for future hydrogen society. First, we investigate PdCuSi as a Pd-based MG and show that this material is promising for capacitive MEMS hydrogen sensor. Second, we employ the Pd-based MG in a hydrogen sensor that has an inverted T-shaped electrode. The sensor is fabricated by a surface micromachining process. We show that the fabricated hydrogen sensor exhibits hysteresis-free and fast response properties at room temperature.

Original language	English
Pages (from-to)	70-77
Number of pages	8
Journal	Electronics and Communications in Japan
Volume	102
Issue number	3
DOIs	https://doi.org/10.1002/ecj.12139
Publication status	Published - 2019 Mar
Externally published	Yes

Keywords

MEMS
Pd-based metallic glass
capacitive
hydrogen sensor
hydrogen society

ASJC Scopus subject areas

Signal Processing
Physics and Astronomy(all)
Computer Networks and Communications
Electrical and Electronic Engineering
Applied Mathematics

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10.1002/ecj.12139

Cite this

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title = "A review of capacitive MEMS hydrogen sensor using Pd-based metallic glass with fast response and low power consumption",

abstract = "This paper reports on a capacitive MEMS hydrogen sensor using Pd-based metallic glass (MG) for future hydrogen society. First, we investigate PdCuSi as a Pd-based MG and show that this material is promising for capacitive MEMS hydrogen sensor. Second, we employ the Pd-based MG in a hydrogen sensor that has an inverted T-shaped electrode. The sensor is fabricated by a surface micromachining process. We show that the fabricated hydrogen sensor exhibits hysteresis-free and fast response properties at room temperature.",

keywords = "MEMS, Pd-based metallic glass, capacitive, hydrogen sensor, hydrogen society",

author = "Hiroaki Yamazaki and Yumi Hayashi and Kei Masunishi and Daiki Ono and Tamio Ikehashi",

note = "Funding Information: Device fabrication of this work was supported by the Japan Semiconductor Corporation. The authors would like to thank Y Chiba, K Igarashi, H Takahashi, T Kato, T Ohkubo, M Sakai and S Sato for the development of the fabrication process. Part of this study was supported by the NIMS Nanofabrication Platform in Nanotechnology Platform Project sponsored by the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan. The authors are also grateful to Y Kurui, H Tomizawa, and T Saito for their support in the development. Last but not least, the authors would like to thank A. Kojima, Y Sugizaki and H Shibata for their support and encouragement. Publisher Copyright: {\textcopyright} 2019 Wiley Periodicals, Inc.",

year = "2019",

month = mar,

doi = "10.1002/ecj.12139",

language = "English",

volume = "102",

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AU - Yamazaki, Hiroaki

AU - Hayashi, Yumi

AU - Masunishi, Kei

AU - Ono, Daiki

AU - Ikehashi, Tamio

N1 - Funding Information: Device fabrication of this work was supported by the Japan Semiconductor Corporation. The authors would like to thank Y Chiba, K Igarashi, H Takahashi, T Kato, T Ohkubo, M Sakai and S Sato for the development of the fabrication process. Part of this study was supported by the NIMS Nanofabrication Platform in Nanotechnology Platform Project sponsored by the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan. The authors are also grateful to Y Kurui, H Tomizawa, and T Saito for their support in the development. Last but not least, the authors would like to thank A. Kojima, Y Sugizaki and H Shibata for their support and encouragement. Publisher Copyright: © 2019 Wiley Periodicals, Inc.

PY - 2019/3

Y1 - 2019/3

N2 - This paper reports on a capacitive MEMS hydrogen sensor using Pd-based metallic glass (MG) for future hydrogen society. First, we investigate PdCuSi as a Pd-based MG and show that this material is promising for capacitive MEMS hydrogen sensor. Second, we employ the Pd-based MG in a hydrogen sensor that has an inverted T-shaped electrode. The sensor is fabricated by a surface micromachining process. We show that the fabricated hydrogen sensor exhibits hysteresis-free and fast response properties at room temperature.

AB - This paper reports on a capacitive MEMS hydrogen sensor using Pd-based metallic glass (MG) for future hydrogen society. First, we investigate PdCuSi as a Pd-based MG and show that this material is promising for capacitive MEMS hydrogen sensor. Second, we employ the Pd-based MG in a hydrogen sensor that has an inverted T-shaped electrode. The sensor is fabricated by a surface micromachining process. We show that the fabricated hydrogen sensor exhibits hysteresis-free and fast response properties at room temperature.

KW - MEMS

KW - Pd-based metallic glass

KW - capacitive

KW - hydrogen sensor

KW - hydrogen society

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A review of capacitive MEMS hydrogen sensor using Pd-based metallic glass with fast response and low power consumption

Abstract

Keywords

ASJC Scopus subject areas

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