A robust RF MEMS variable capacitor with piezoelectric and electrostatic actuation

T. Ikehashi; T. Ohguro; E. Ogawa; H. Yamazaki; K. Kojima; M. Matsuo; K. Ishimaru; H. Ishiuchi

doi:10.1109/MWSYM.2006.249903

A robust RF MEMS variable capacitor with piezoelectric and electrostatic actuation

T. Ikehashi^*, T. Ohguro, E. Ogawa, H. Yamazaki, K. Kojima, M. Matsuo, K. Ishimaru, H. Ishiuchi

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

7 Citations (Scopus)

Abstract

An RF MEMS variable capacitor using hybrid actuation of piezoelectric and electrostatic forces is presented. A surface micromachining process is used to fabricate the device. The piezoelectric actuator, which uses thin film PZT, enables low voltage actuation while the electrostatic actuator realizes large capacitance ratio. The measured capacitance ratio is Cmax/Cmin=14 at 5V. We demonstrate that the hybrid actuation enables to lower the pull-in voltage without changing the pull-out voltage. We also show that the shift of pull-out voltage due to dielectric charging can be reduced drastically at actuation voltages below 10V. In this sense, the hybrid actuation can realize low voltage operation with enhanced robustness for stiction.

Original language	English
Article number	4014812
Pages (from-to)	39-42
Number of pages	4
Journal	IEEE MTT-S International Microwave Symposium Digest
DOIs	https://doi.org/10.1109/MWSYM.2006.249903
Publication status	Published - 2006 Dec 1
Externally published	Yes
Event	2006 IEEE MTT-S International Microwave Symposium Digest - San Francisco, CA, United States Duration: 2006 Jun 11 → 2006 Jun 16

Keywords

Dielectric charging
Piezoelectric actuator
RF MEMS
Stiction
Surface micromachining
Variable capacitor

ASJC Scopus subject areas

Radiation
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1109/MWSYM.2006.249903

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title = "A robust RF MEMS variable capacitor with piezoelectric and electrostatic actuation",

abstract = "An RF MEMS variable capacitor using hybrid actuation of piezoelectric and electrostatic forces is presented. A surface micromachining process is used to fabricate the device. The piezoelectric actuator, which uses thin film PZT, enables low voltage actuation while the electrostatic actuator realizes large capacitance ratio. The measured capacitance ratio is Cmax/Cmin=14 at 5V. We demonstrate that the hybrid actuation enables to lower the pull-in voltage without changing the pull-out voltage. We also show that the shift of pull-out voltage due to dielectric charging can be reduced drastically at actuation voltages below 10V. In this sense, the hybrid actuation can realize low voltage operation with enhanced robustness for stiction.",

keywords = "Dielectric charging, Piezoelectric actuator, RF MEMS, Stiction, Surface micromachining, Variable capacitor",

author = "T. Ikehashi and T. Ohguro and E. Ogawa and H. Yamazaki and K. Kojima and M. Matsuo and K. Ishimaru and H. Ishiuchi",

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doi = "10.1109/MWSYM.2006.249903",

language = "English",

pages = "39--42",

journal = "IEEE MTT-S International Microwave Symposium Digest",

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note = "2006 IEEE MTT-S International Microwave Symposium Digest ; Conference date: 11-06-2006 Through 16-06-2006",

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T1 - A robust RF MEMS variable capacitor with piezoelectric and electrostatic actuation

AU - Ikehashi, T.

AU - Ohguro, T.

AU - Ogawa, E.

AU - Yamazaki, H.

AU - Kojima, K.

AU - Matsuo, M.

AU - Ishimaru, K.

AU - Ishiuchi, H.

PY - 2006/12/1

Y1 - 2006/12/1

N2 - An RF MEMS variable capacitor using hybrid actuation of piezoelectric and electrostatic forces is presented. A surface micromachining process is used to fabricate the device. The piezoelectric actuator, which uses thin film PZT, enables low voltage actuation while the electrostatic actuator realizes large capacitance ratio. The measured capacitance ratio is Cmax/Cmin=14 at 5V. We demonstrate that the hybrid actuation enables to lower the pull-in voltage without changing the pull-out voltage. We also show that the shift of pull-out voltage due to dielectric charging can be reduced drastically at actuation voltages below 10V. In this sense, the hybrid actuation can realize low voltage operation with enhanced robustness for stiction.

AB - An RF MEMS variable capacitor using hybrid actuation of piezoelectric and electrostatic forces is presented. A surface micromachining process is used to fabricate the device. The piezoelectric actuator, which uses thin film PZT, enables low voltage actuation while the electrostatic actuator realizes large capacitance ratio. The measured capacitance ratio is Cmax/Cmin=14 at 5V. We demonstrate that the hybrid actuation enables to lower the pull-in voltage without changing the pull-out voltage. We also show that the shift of pull-out voltage due to dielectric charging can be reduced drastically at actuation voltages below 10V. In this sense, the hybrid actuation can realize low voltage operation with enhanced robustness for stiction.

KW - Dielectric charging

KW - Piezoelectric actuator

KW - RF MEMS

KW - Stiction

KW - Surface micromachining

KW - Variable capacitor

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JO - IEEE MTT-S International Microwave Symposium Digest

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ER -

A robust RF MEMS variable capacitor with piezoelectric and electrostatic actuation

Abstract

Keywords

ASJC Scopus subject areas

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