A scalable Si-based micro thermoelectric generator

Takanobu Watanabe; Shuhei Asada; Taiyu Xu; Shuichiro Hashimoto; Shunsuke Ohba; Yuya Himeda; Ryo Yamato; Hui Zhang; Motohiro Tomita; Takashi Matsukawa; Yoshinari Kamakura; Hiroya Ikeda

doi:10.1109/EDTM.2017.7947519

A scalable Si-based micro thermoelectric generator

Takanobu Watanabe, Shuhei Asada, Taiyu Xu, Shuichiro Hashimoto, Shunsuke Ohba, Yuya Himeda, Ryo Yamato, Hui Zhang, Motohiro Tomita, Takashi Matsukawa, Yoshinari Kamakura, Hiroya Ikeda

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

22 Citations (Scopus)

Abstract

A new device architecture of micro thermoelectric generator (μ-TEG) is proposed. The μ-TEG utilizes silicon nanowires as the thermoelectric (TE) material, and it can be fabricated by the CMOS-compatible process. It is driven by an 'evanescent thermal field' exuding around a heat flow perpendicular to the substrate. We demonstrate experimentally that the TE power increases in the shorter TE leg lengths. The results show that the TE power density is scalable by miniaturizing and integrating the proposed structure.

Original language	English
Title of host publication	2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	86-87
Number of pages	2
ISBN (Electronic)	9781509046591
DOIs	https://doi.org/10.1109/EDTM.2017.7947519
Publication status	Published - 2017 Jun 13
Event	2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Toyama, Japan Duration: 2017 Feb 28 → 2017 Mar 2

Publication series

Name	2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings

Other

Other	2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017
Country/Territory	Japan
City	Toyama
Period	17/2/28 → 17/3/2

Keywords

Energy harvester
Si nanowire
thermoelectrics

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/EDTM.2017.7947519

Cite this

Watanabe, T., Asada, S., Xu, T., Hashimoto, S., Ohba, S., Himeda, Y., Yamato, R., Zhang, H., Tomita, M., Matsukawa, T., Kamakura, Y., & Ikeda, H. (2017). A scalable Si-based micro thermoelectric generator. In 2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings (pp. 86-87). [7947519] (2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/EDTM.2017.7947519

A scalable Si-based micro thermoelectric generator. / Watanabe, Takanobu; Asada, Shuhei; Xu, Taiyu et al.
2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2017. p. 86-87 7947519 (2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Watanabe, T, Asada, S, Xu, T, Hashimoto, S, Ohba, S, Himeda, Y, Yamato, R, Zhang, H, Tomita, M, Matsukawa, T, Kamakura, Y & Ikeda, H 2017, A scalable Si-based micro thermoelectric generator. in 2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings., 7947519, 2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings, Institute of Electrical and Electronics Engineers Inc., pp. 86-87, 2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017, Toyama, Japan, 17/2/28. https://doi.org/10.1109/EDTM.2017.7947519

Watanabe T, Asada S, Xu T, Hashimoto S, Ohba S, Himeda Y et al. A scalable Si-based micro thermoelectric generator. In 2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2017. p. 86-87. 7947519. (2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings). doi: 10.1109/EDTM.2017.7947519

@inproceedings{c678ececd95e49b4a87817abaf73947c,

title = "A scalable Si-based micro thermoelectric generator",

abstract = "A new device architecture of micro thermoelectric generator (μ-TEG) is proposed. The μ-TEG utilizes silicon nanowires as the thermoelectric (TE) material, and it can be fabricated by the CMOS-compatible process. It is driven by an 'evanescent thermal field' exuding around a heat flow perpendicular to the substrate. We demonstrate experimentally that the TE power increases in the shorter TE leg lengths. The results show that the TE power density is scalable by miniaturizing and integrating the proposed structure.",

keywords = "Energy harvester, Si nanowire, thermoelectrics",

author = "Takanobu Watanabe and Shuhei Asada and Taiyu Xu and Shuichiro Hashimoto and Shunsuke Ohba and Yuya Himeda and Ryo Yamato and Hui Zhang and Motohiro Tomita and Takashi Matsukawa and Yoshinari Kamakura and Hiroya Ikeda",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 ; Conference date: 28-02-2017 Through 02-03-2017",

year = "2017",

month = jun,

day = "13",

doi = "10.1109/EDTM.2017.7947519",

language = "English",

series = "2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "86--87",

booktitle = "2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings",

}

TY - GEN

T1 - A scalable Si-based micro thermoelectric generator

AU - Watanabe, Takanobu

AU - Asada, Shuhei

AU - Xu, Taiyu

AU - Hashimoto, Shuichiro

AU - Ohba, Shunsuke

AU - Himeda, Yuya

AU - Yamato, Ryo

AU - Zhang, Hui

AU - Tomita, Motohiro

AU - Matsukawa, Takashi

AU - Kamakura, Yoshinari

AU - Ikeda, Hiroya

PY - 2017/6/13

Y1 - 2017/6/13

N2 - A new device architecture of micro thermoelectric generator (μ-TEG) is proposed. The μ-TEG utilizes silicon nanowires as the thermoelectric (TE) material, and it can be fabricated by the CMOS-compatible process. It is driven by an 'evanescent thermal field' exuding around a heat flow perpendicular to the substrate. We demonstrate experimentally that the TE power increases in the shorter TE leg lengths. The results show that the TE power density is scalable by miniaturizing and integrating the proposed structure.

AB - A new device architecture of micro thermoelectric generator (μ-TEG) is proposed. The μ-TEG utilizes silicon nanowires as the thermoelectric (TE) material, and it can be fabricated by the CMOS-compatible process. It is driven by an 'evanescent thermal field' exuding around a heat flow perpendicular to the substrate. We demonstrate experimentally that the TE power increases in the shorter TE leg lengths. The results show that the TE power density is scalable by miniaturizing and integrating the proposed structure.

KW - Energy harvester

KW - Si nanowire

KW - thermoelectrics

UR - http://www.scopus.com/inward/record.url?scp=85022064360&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85022064360&partnerID=8YFLogxK

U2 - 10.1109/EDTM.2017.7947519

DO - 10.1109/EDTM.2017.7947519

M3 - Conference contribution

AN - SCOPUS:85022064360

T3 - 2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings

SP - 86

EP - 87

BT - 2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2017 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2017

Y2 - 28 February 2017 through 2 March 2017

ER -

A scalable Si-based micro thermoelectric generator

Abstract

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Keywords

ASJC Scopus subject areas

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