TY - JOUR
T1 - A single-atom electron source in practical gun of an extreme high vacuum
AU - Urata, Tomohiro
AU - Ishikawa, Tsuyoshi
AU - Cho, Boklae
AU - Rokuta, Eiji
AU - Rokuta, E.
AU - Oshima, Chuhei
AU - Nonogaki, Ryozo
AU - Saito, Hidekazu
AU - Yonezawa, Akira
PY - 2008/2/21
Y1 - 2008/2/21
N2 - For developing electron microscopes mounted with a single-atom electron source, we constructed a practical gun chamber of an extreme high vacuum (XHV), and demonstrated excellent characteristics of its emission beams; the stable beam with the current fluctuation of ̃0.8 % was observed at the total current of 20 nA in the XHV of 1 × 10-9 Pa.
AB - For developing electron microscopes mounted with a single-atom electron source, we constructed a practical gun chamber of an extreme high vacuum (XHV), and demonstrated excellent characteristics of its emission beams; the stable beam with the current fluctuation of ̃0.8 % was observed at the total current of 20 nA in the XHV of 1 × 10-9 Pa.
KW - Electron emission
KW - Extreme High Vacuum (XHV)
KW - Scanning Electron Microscopy (SEM)
KW - Single-atom electron source
UR - http://www.scopus.com/inward/record.url?scp=40049102656&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=40049102656&partnerID=8YFLogxK
U2 - 10.1380/ejssnt.2008.68
DO - 10.1380/ejssnt.2008.68
M3 - Article
AN - SCOPUS:40049102656
SN - 1348-0391
VL - 6
SP - 68
EP - 71
JO - e-Journal of Surface Science and Nanotechnology
JF - e-Journal of Surface Science and Nanotechnology
ER -