A study of a high-pressure micropump for integrated chemical analysing systems

Shuichi Shoji*, Masayoshi Esashi, Bart van der Schoot, Nico de Rooij

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

33 Citations (Scopus)


To fabricate a high-pressure micropump, a diaphragm-type pump using passive check valves has been studied and a novel micro check valve developed. It has a simple structure consisting of a silicone rubber float and a through-hole. The reverse flow resistance of this valve is about 10 atm min/μl and the forward-to-reverse flow ratio is about 1000 at an applied pressure of 0.5 atm. This valve can be applied to the high-pressure micropump for pressures up to at least 1 atm.

Original languageEnglish
Pages (from-to)335-339
Number of pages5
JournalSensors and Actuators: A. Physical
Issue number1-3
Publication statusPublished - 1992 Apr
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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