A study of the critical factor determining the size of etched latent tracks formed on SiO 2 glass by swift-Cl-ion irradiation

Ken Ichi Nomura; Yoshimichi Ohki; Makoto Fujimaki; Xiaomin Wang; Koichi Awazu; Tetsuro Komatsubara

doi:10.1016/j.nimb.2011.01.020

A study of the critical factor determining the size of etched latent tracks formed on SiO ₂ glass by swift-Cl-ion irradiation

Ken Ichi Nomura^*, Yoshimichi Ohki, Makoto Fujimaki, Xiaomin Wang, Koichi Awazu, Tetsuro Komatsubara

^*Corresponding author for this work

Kagami Memorial Research Institute for Materials Science and Technology

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

When a Cl ion with energy of the order of megaelectronvolts collides with SiO ₂ glass, it penetrates the glass along a straight line. The region through which the ion passes and its vicinity, called the latent track, can be easily etched by hydrofluoric acid, resulting in the formation of a nanopore. With increasing ion energy, the nanopore radius first increases, reaches a maximum, and then decreases. In order to analyze this strange phenomenon, we investigated the radius of the region that melted upon ion irradiation, as one of the possible approaches. We calculated its radius using heat diffusion equations and compared it with the radius of nanopores. We found that both the radii depend on the ion energy in a similar manner.

Original language	English
Pages (from-to)	1-4
Number of pages	4
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	272
DOIs	https://doi.org/10.1016/j.nimb.2011.01.020
Publication status	Published - 2012 Feb 1

Keywords

Etching
Heat diffusion equation
Latent track
Nanopore
SiO glass
Swift heavy ion

ASJC Scopus subject areas

Nuclear and High Energy Physics
Instrumentation

Access to Document

10.1016/j.nimb.2011.01.020

Cite this

Nomura, K. I., Ohki, Y., Fujimaki, M., Wang, X., Awazu, K., & Komatsubara, T. (2012). A study of the critical factor determining the size of etched latent tracks formed on SiO ₂ glass by swift-Cl-ion irradiation. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 272, 1-4. https://doi.org/10.1016/j.nimb.2011.01.020

A study of the critical factor determining the size of etched latent tracks formed on SiO ₂ glass by swift-Cl-ion irradiation. / Nomura, Ken Ichi; Ohki, Yoshimichi; Fujimaki, Makoto et al.
In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 272, 01.02.2012, p. 1-4.

Research output: Contribution to journal › Article › peer-review

Nomura, KI, Ohki, Y, Fujimaki, M, Wang, X, Awazu, K & Komatsubara, T 2012, 'A study of the critical factor determining the size of etched latent tracks formed on SiO ₂ glass by swift-Cl-ion irradiation', Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, vol. 272, pp. 1-4. https://doi.org/10.1016/j.nimb.2011.01.020

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abstract = "When a Cl ion with energy of the order of megaelectronvolts collides with SiO 2 glass, it penetrates the glass along a straight line. The region through which the ion passes and its vicinity, called the latent track, can be easily etched by hydrofluoric acid, resulting in the formation of a nanopore. With increasing ion energy, the nanopore radius first increases, reaches a maximum, and then decreases. In order to analyze this strange phenomenon, we investigated the radius of the region that melted upon ion irradiation, as one of the possible approaches. We calculated its radius using heat diffusion equations and compared it with the radius of nanopores. We found that both the radii depend on the ion energy in a similar manner.",

keywords = "Etching, Heat diffusion equation, Latent track, Nanopore, SiO glass, Swift heavy ion",

author = "Nomura, {Ken Ichi} and Yoshimichi Ohki and Makoto Fujimaki and Xiaomin Wang and Koichi Awazu and Tetsuro Komatsubara",

note = "Funding Information: The present research was supported in part by the Budget for Nuclear Research of the Ministry of Education, Culture, Sports, Science and Technology, Japan, and also by a Grant-in-Aid from the Japan Society for the Promotion of Science (JSPS) for JSPS Fellows.",

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AU - Wang, Xiaomin

AU - Awazu, Koichi

AU - Komatsubara, Tetsuro

N1 - Funding Information: The present research was supported in part by the Budget for Nuclear Research of the Ministry of Education, Culture, Sports, Science and Technology, Japan, and also by a Grant-in-Aid from the Japan Society for the Promotion of Science (JSPS) for JSPS Fellows.

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N2 - When a Cl ion with energy of the order of megaelectronvolts collides with SiO 2 glass, it penetrates the glass along a straight line. The region through which the ion passes and its vicinity, called the latent track, can be easily etched by hydrofluoric acid, resulting in the formation of a nanopore. With increasing ion energy, the nanopore radius first increases, reaches a maximum, and then decreases. In order to analyze this strange phenomenon, we investigated the radius of the region that melted upon ion irradiation, as one of the possible approaches. We calculated its radius using heat diffusion equations and compared it with the radius of nanopores. We found that both the radii depend on the ion energy in a similar manner.

AB - When a Cl ion with energy of the order of megaelectronvolts collides with SiO 2 glass, it penetrates the glass along a straight line. The region through which the ion passes and its vicinity, called the latent track, can be easily etched by hydrofluoric acid, resulting in the formation of a nanopore. With increasing ion energy, the nanopore radius first increases, reaches a maximum, and then decreases. In order to analyze this strange phenomenon, we investigated the radius of the region that melted upon ion irradiation, as one of the possible approaches. We calculated its radius using heat diffusion equations and compared it with the radius of nanopores. We found that both the radii depend on the ion energy in a similar manner.

KW - Etching

KW - Heat diffusion equation

KW - Latent track

KW - Nanopore

KW - SiO glass

KW - Swift heavy ion

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