TY - GEN
T1 - A study on spatial resolution of the microwave atomic forcemicroscope imaging affected by scanning speed
AU - Zhang, Lan
AU - Hosoi, Atsushi
AU - Ju, Yang
N1 - Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2013
Y1 - 2013
N2 - Using the microwave atomic force microscope (M-AFM) measuring system, the sampleof Au nanowires arranged on glass wafer was sensed with three kinds of scanning speed. As theresults shown, the spatial resolution of topographies is increased with the decrease of scanningspeed. However, the precision of microwave images is not changed much with decreasing thescanning speed. Since M-AFM with the compact microwave instrument can always implement thereal time measurement, the variation of scanning speed will not affect the microwave measurement.
AB - Using the microwave atomic force microscope (M-AFM) measuring system, the sampleof Au nanowires arranged on glass wafer was sensed with three kinds of scanning speed. As theresults shown, the spatial resolution of topographies is increased with the decrease of scanningspeed. However, the precision of microwave images is not changed much with decreasing thescanning speed. Since M-AFM with the compact microwave instrument can always implement thereal time measurement, the variation of scanning speed will not affect the microwave measurement.
KW - Atomic force microscope
KW - Electrical property
KW - Microwave
KW - Nano-structural probe
UR - http://www.scopus.com/inward/record.url?scp=84875864278&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84875864278&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/MSF.750.200
DO - 10.4028/www.scientific.net/MSF.750.200
M3 - Conference contribution
AN - SCOPUS:84875864278
SN - 9783037856604
T3 - Materials Science Forum
SP - 200
EP - 203
BT - Advanced Materials Science and Technology
PB - Trans Tech Publications Ltd
T2 - 8th International Forum on Advanced Materials Science and Technology, IFAMST 2012
Y2 - 1 August 2012 through 4 August 2012
ER -