Accurate extraction of kt2of piezoelectric film/substrate structure by conversion loss method for subtracting experimental acoustic losses in the substrate

Ryota Tatsumi; Takahiko Yanagitani

doi:10.1109/IUS46767.2020.9251360

Accurate extraction of kt₂of piezoelectric film/substrate structure by conversion loss method for subtracting experimental acoustic losses in the substrate

Ryota Tatsumi, Takahiko Yanagitani

School of Advanced Science and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

Electromechanical coupling coefficient (pmb{k}{mathbf{t}}{}-{mathbf{2}}) is an important parameter for determining the performances of RF BAW filter. The IEEE standard recommends a resonance-antiresonance method for determining the pmb{k}{mathbf{t}}{}-{mathbf{2}} of the piezoelectric films by using a self-standing film structure. The method for determining pmb{k}{mathbf{t}}{}-{mathbf{2}} from the film/wafer structure reduces the time and cost of wafer etching process. pmb{k}{mathbf{t}}{}-{mathbf{2}} is underestimated due to the acoustic losses in the substrate in the conventional conversion loss method, which can extract the pmb{k}{mathbf{t}}{}-{mathbf{2}} from HBAR. In this study, we introduce a method for subtracting the acoustic losses in the substrate.

Original language	English
Title of host publication	IUS 2020 - International Ultrasonics Symposium, Proceedings
Publisher	IEEE Computer Society
ISBN (Electronic)	9781728154480
DOIs	https://doi.org/10.1109/IUS46767.2020.9251360
Publication status	Published - 2020 Sept 7
Event	2020 IEEE International Ultrasonics Symposium, IUS 2020 - Las Vegas, United States Duration: 2020 Sept 7 → 2020 Sept 11

Publication series

Name	IEEE International Ultrasonics Symposium, IUS
Volume	2020-September
ISSN (Print)	1948-5719
ISSN (Electronic)	1948-5727

Conference

Conference	2020 IEEE International Ultrasonics Symposium, IUS 2020
Country/Territory	United States
City	Las Vegas
Period	20/9/7 → 20/9/11

Keywords

Electromechanical coupling coefficient
HBAR
Piezoelectric film
Resonant frequency

ASJC Scopus subject areas

Acoustics and Ultrasonics

Access to Document

10.1109/IUS46767.2020.9251360

Cite this

Tatsumi, R., & Yanagitani, T. (2020). Accurate extraction of kt₂of piezoelectric film/substrate structure by conversion loss method for subtracting experimental acoustic losses in the substrate. In IUS 2020 - International Ultrasonics Symposium, Proceedings [9251360] (IEEE International Ultrasonics Symposium, IUS; Vol. 2020-September). IEEE Computer Society. https://doi.org/10.1109/IUS46767.2020.9251360

Accurate extraction of kt₂of piezoelectric film/substrate structure by conversion loss method for subtracting experimental acoustic losses in the substrate. / Tatsumi, Ryota; Yanagitani, Takahiko.
IUS 2020 - International Ultrasonics Symposium, Proceedings. IEEE Computer Society, 2020. 9251360 (IEEE International Ultrasonics Symposium, IUS; Vol. 2020-September).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Tatsumi, R & Yanagitani, T 2020, Accurate extraction of kt₂of piezoelectric film/substrate structure by conversion loss method for subtracting experimental acoustic losses in the substrate. in IUS 2020 - International Ultrasonics Symposium, Proceedings., 9251360, IEEE International Ultrasonics Symposium, IUS, vol. 2020-September, IEEE Computer Society, 2020 IEEE International Ultrasonics Symposium, IUS 2020, Las Vegas, United States, 20/9/7. https://doi.org/10.1109/IUS46767.2020.9251360

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title = "Accurate extraction of kt2of piezoelectric film/substrate structure by conversion loss method for subtracting experimental acoustic losses in the substrate",

abstract = "Electromechanical coupling coefficient (pmb{k}{mathbf{t}}{}-{mathbf{2}}) is an important parameter for determining the performances of RF BAW filter. The IEEE standard recommends a resonance-antiresonance method for determining the pmb{k}{mathbf{t}}{}-{mathbf{2}} of the piezoelectric films by using a self-standing film structure. The method for determining pmb{k}{mathbf{t}}{}-{mathbf{2}} from the film/wafer structure reduces the time and cost of wafer etching process. pmb{k}{mathbf{t}}{}-{mathbf{2}} is underestimated due to the acoustic losses in the substrate in the conventional conversion loss method, which can extract the pmb{k}{mathbf{t}}{}-{mathbf{2}} from HBAR. In this study, we introduce a method for subtracting the acoustic losses in the substrate.",

keywords = "Electromechanical coupling coefficient, HBAR, Piezoelectric film, Resonant frequency",

author = "Ryota Tatsumi and Takahiko Yanagitani",

note = "Funding Information: This work was supported by the JST CREST (No. JPMJCR20Q1) and KAKENHI (Grant-in-Aid for Scientific Research No.19H02202, and No.18K19037). Publisher Copyright: {\textcopyright} 2020 IEEE.; 2020 IEEE International Ultrasonics Symposium, IUS 2020 ; Conference date: 07-09-2020 Through 11-09-2020",

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