TY - GEN
T1 - Aerosol deposition fabrication of transparent electro-optic films for optical modulator
AU - Nakada, Masafumi
AU - Ohashi, Keishi
AU - Tsuda, Hiroki
AU - Akedo, Jun
PY - 2006/12/1
Y1 - 2006/12/1
N2 - High-transparent Pb(Zr,Ti)O3 and (Pb,La)(Zr,Ti)O3 films, over 1 μm thick, which have acceptable transmittance loss for use as optical devices, were directly deposited on glass substrates by AD. We found the ferroelectric Pb(Zr,Ti)O3 film by AD produced a fairly high EO coefficient (>150 pm/V), approximately 10 times larger than that of LiNbO3. We developed a Fabry-Perot (FP) optical modulator with electro-optic films fabricated by AD. Transmittance spectra of the FP optical modulator coincided with the optical simulation spectra, which indicated that optical scattering in AD films and at the surface/boundary were very small. We demonstrated an optical intensity modulation with applied electric field to EO film of ferroelectric Pb (Zr, Ti)O3.
AB - High-transparent Pb(Zr,Ti)O3 and (Pb,La)(Zr,Ti)O3 films, over 1 μm thick, which have acceptable transmittance loss for use as optical devices, were directly deposited on glass substrates by AD. We found the ferroelectric Pb(Zr,Ti)O3 film by AD produced a fairly high EO coefficient (>150 pm/V), approximately 10 times larger than that of LiNbO3. We developed a Fabry-Perot (FP) optical modulator with electro-optic films fabricated by AD. Transmittance spectra of the FP optical modulator coincided with the optical simulation spectra, which indicated that optical scattering in AD films and at the surface/boundary were very small. We demonstrated an optical intensity modulation with applied electric field to EO film of ferroelectric Pb (Zr, Ti)O3.
KW - Aerosol deposition
KW - Electro-optic
KW - Fabry-Perot
KW - Optical modulator
KW - Optical properties
KW - Thin film
UR - http://www.scopus.com/inward/record.url?scp=84878252638&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84878252638&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84878252638
SN - 9781604236200
T3 - IMAPS/ACerS - 2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006
SP - 482
EP - 487
BT - IMAPS/ACerS - 2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006
T2 - 2nd International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2006
Y2 - 24 April 2006 through 27 April 2006
ER -