All plastic microfluidic device with built-in 3-D fine microstructures

Hirokazu Matsumura; Hironobu Sato; Yoshitaka Houshi; Shuichi Shoji

All plastic microfluidic device with built-in 3-D fine microstructures

Hirokazu Matsumura^*, Hironobu Sato, Yoshitaka Houshi, Shuichi Shoji

^*Corresponding author for this work

School of Fundamental Science and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

This paper presents the fabrication of all plastic microfluidic devices with built-in 3-D fine microstructures. The built-in micromeshes in the microchannel were formed by the combination of the multi-angle inclined backside exposure and top side exposure of thick Epon SU-8 photoresist on a glass substrate. The lift off method, using LOR (Lift-off Resist) as a sacrificial layer, was utilized to remove the all SU-8 device from the substrate. The monolithic plastic structures realize uniform physical and chemical properties required in microfluidic devices for practical applications. Fragmentation of a water droplet in organic carrier formed by two phase flow was demonstrated.

Original language	English
Title of host publication	Digest of Papers - Microprocesses and Nanotechnology 2005
Subtitle of host publication	2005 International Microprocesses and Nanotechnology Conference
Pages	270-271
Number of pages	2
Publication status	Published - 2005 Dec 1
Event	2005 International Microprocesses and Nanotechnology Conference - Tokyo, Japan Duration: 2005 Oct 25 → 2005 Oct 28

Publication series

Name	Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference
Volume	2005

Conference

Conference	2005 International Microprocesses and Nanotechnology Conference
Country/Territory	Japan
City	Tokyo
Period	05/10/25 → 05/10/28

ASJC Scopus subject areas

Engineering(all)

Cite this

Matsumura, H., Sato, H., Houshi, Y., & Shoji, S. (2005). All plastic microfluidic device with built-in 3-D fine microstructures. In Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference (pp. 270-271). [1595318] (Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference; Vol. 2005).

All plastic microfluidic device with built-in 3-D fine microstructures. / Matsumura, Hirokazu; Sato, Hironobu; Houshi, Yoshitaka et al.
Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference. 2005. p. 270-271 1595318 (Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference; Vol. 2005).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Matsumura, H, Sato, H, Houshi, Y & Shoji, S 2005, All plastic microfluidic device with built-in 3-D fine microstructures. in Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference., 1595318, Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference, vol. 2005, pp. 270-271, 2005 International Microprocesses and Nanotechnology Conference, Tokyo, Japan, 05/10/25.

Matsumura H, Sato H, Houshi Y, Shoji S. All plastic microfluidic device with built-in 3-D fine microstructures. In Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference. 2005. p. 270-271. 1595318. (Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference).

Matsumura, Hirokazu ; Sato, Hironobu ; Houshi, Yoshitaka et al. / All plastic microfluidic device with built-in 3-D fine microstructures. Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference. 2005. pp. 270-271 (Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference).

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AB - This paper presents the fabrication of all plastic microfluidic devices with built-in 3-D fine microstructures. The built-in micromeshes in the microchannel were formed by the combination of the multi-angle inclined backside exposure and top side exposure of thick Epon SU-8 photoresist on a glass substrate. The lift off method, using LOR (Lift-off Resist) as a sacrificial layer, was utilized to remove the all SU-8 device from the substrate. The monolithic plastic structures realize uniform physical and chemical properties required in microfluidic devices for practical applications. Fragmentation of a water droplet in organic carrier formed by two phase flow was demonstrated.

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All plastic microfluidic device with built-in 3-D fine microstructures

Abstract

Publication series

Conference

ASJC Scopus subject areas

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