An all SU-8 microfluidic chip with built-in 3D fine microstructures

Hironobu Sato*, Hirokazu Matsumura, Satoshi Keino, Shuichi Shoji

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

93 Citations (Scopus)


This paper describes the fabrication method of an all SU-8 microfluidic device with built-in 3D fine micromesh structures. 3D micromesh structures were seamlessly integrated into the SU-8 sealed microchannel. To eliminate gap formation and filling of the microchannel, the built-in micromeshes in the microchannel were formed by photolithography after bonding the SU-8 top-cover layer and the SU-8 bottom substrate. The lift-off method, using lift-off resist as a sacrificial layer, was utilized to release the all SU-8 microfluidic chips. Monolithic SU-8 structures realize uniform physical and chemical surface properties required in microfluidic devices for practical use. As an application, fragmentation of a water droplet in an organic carrier formed by a two-phase flow was demonstrated.

Original languageEnglish
Article number010
Pages (from-to)2318-2322
Number of pages5
JournalJournal of Micromechanics and Microengineering
Issue number11
Publication statusPublished - 2006 Nov 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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