An elastomer-based MEMS fabry-perot interferometer for physical and biological sensing by dry transfer technique

Kazuhiro Takahashi; Toshinori Fujie; Nobutaka Sato; Shinji Takeoka; Kazuaki Sawada

doi:10.1109/MEMSYS.2017.7863505

An elastomer-based MEMS fabry-perot interferometer for physical and biological sensing by dry transfer technique

Kazuhiro Takahashi^*, Toshinori Fujie, Nobutaka Sato, Shinji Takeoka, Kazuaki Sawada

^*Corresponding author for this work

School of Advanced Science and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

We developed an elastomer-based Fabry-Perot interferometer with 120-1080 nm gap between a freestanding thin film and a substrate using dry transfer technique. A newly developed elastomeric nanosheet using a polystyrene-polybutadiene-polystyrene triblock copolymer (SBS) provides low Young's modulus of 40 MPa, large elastic strain of 40%, and high adhesiveness. A freestanding SBS nanosheet can be formed by dry transfer technique without vacuum and high temperature processes owing to the high adhesiveness of SBS nanosheet. A minimum gap length of 120 nm with an 80 μm in diameter was achieved. With the pressure change, the freestanding membrane was found to deform with good adhesion between the dry transferred SBS and the substrate.

Original language	English
Title of host publication	2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	704-707
Number of pages	4
ISBN (Electronic)	9781509050789
DOIs	https://doi.org/10.1109/MEMSYS.2017.7863505
Publication status	Published - 2017 Feb 23
Event	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States Duration: 2017 Jan 22 → 2017 Jan 26

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Country/Territory	United States
City	Las Vegas
Period	17/1/22 → 17/1/26

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2017.7863505

Cite this

Takahashi, K., Fujie, T., Sato, N., Takeoka, S., & Sawada, K. (2017). An elastomer-based MEMS fabry-perot interferometer for physical and biological sensing by dry transfer technique. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 704-707). Article 7863505 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863505

An elastomer-based MEMS fabry-perot interferometer for physical and biological sensing by dry transfer technique. / Takahashi, Kazuhiro; Fujie, Toshinori; Sato, Nobutaka et al.
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 704-707 7863505 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Takahashi, K, Fujie, T, Sato, N, Takeoka, S & Sawada, K 2017, An elastomer-based MEMS fabry-perot interferometer for physical and biological sensing by dry transfer technique. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863505, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 704-707, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, United States, 17/1/22. https://doi.org/10.1109/MEMSYS.2017.7863505

Takahashi K, Fujie T, Sato N, Takeoka S, Sawada K. An elastomer-based MEMS fabry-perot interferometer for physical and biological sensing by dry transfer technique. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 704-707. 7863505. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2017.7863505

Takahashi, Kazuhiro ; Fujie, Toshinori ; Sato, Nobutaka et al. / An elastomer-based MEMS fabry-perot interferometer for physical and biological sensing by dry transfer technique. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 704-707 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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abstract = "We developed an elastomer-based Fabry-Perot interferometer with 120-1080 nm gap between a freestanding thin film and a substrate using dry transfer technique. A newly developed elastomeric nanosheet using a polystyrene-polybutadiene-polystyrene triblock copolymer (SBS) provides low Young's modulus of 40 MPa, large elastic strain of 40%, and high adhesiveness. A freestanding SBS nanosheet can be formed by dry transfer technique without vacuum and high temperature processes owing to the high adhesiveness of SBS nanosheet. A minimum gap length of 120 nm with an 80 μm in diameter was achieved. With the pressure change, the freestanding membrane was found to deform with good adhesion between the dry transferred SBS and the substrate.",

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AU - Sawada, Kazuaki

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AB - We developed an elastomer-based Fabry-Perot interferometer with 120-1080 nm gap between a freestanding thin film and a substrate using dry transfer technique. A newly developed elastomeric nanosheet using a polystyrene-polybutadiene-polystyrene triblock copolymer (SBS) provides low Young's modulus of 40 MPa, large elastic strain of 40%, and high adhesiveness. A freestanding SBS nanosheet can be formed by dry transfer technique without vacuum and high temperature processes owing to the high adhesiveness of SBS nanosheet. A minimum gap length of 120 nm with an 80 μm in diameter was achieved. With the pressure change, the freestanding membrane was found to deform with good adhesion between the dry transferred SBS and the substrate.

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An elastomer-based MEMS fabry-perot interferometer for physical and biological sensing by dry transfer technique

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