Abstract
A 4-Mbit dynamic RAM has been designed and fabricated using 1.0-μm twin-tub CMOS technology. The memory array consists of trenched n-channel depletion-type capacitor cells in a p-well. Very high α-particle immunity was achieved with this structure. One cell measures 3.0×5.8 µm2 yielding a chip size of 7.84 x 17.48 mm2. An on-chip voltage converter circuit was implemented as a mask option to investigate a possible solution to the MOSFET reliability problem caused by hot carriers. An 8-bit parallel test mode was introduced to reduce the RAM test time. Metal mask options provide static column mode and fast page mode operation. The chip is usable as ×1 or ×4 with a bonding option. Using an external 5-V power supply, the RAS access time is 80 ns at room temperature. Typical active current is 60 mA at a 220-ns cycle time with a standby current of 0.5 mA.
Original language | English |
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Pages (from-to) | 605-611 |
Number of pages | 7 |
Journal | IEEE Journal of Solid-State Circuits |
Volume | 21 |
Issue number | 5 |
DOIs | |
Publication status | Published - 1986 Oct |
Externally published | Yes |
ASJC Scopus subject areas
- Electrical and Electronic Engineering