An intermittent free-vibration MEMS gyroscope enabled by catch-and-release mechanism for low-power and fast-startup applications

Ryunosuke Gando; Haruka Kubo; Yasushi Tomizawa; Etsuji Ogawa; Shunta Maeda; Kei Masunishi; Yohei Hatakeyama; Tetsuro Itakura; Tamio Ikehashi

doi:10.1109/MEMSYS.2017.7863331

An intermittent free-vibration MEMS gyroscope enabled by catch-and-release mechanism for low-power and fast-startup applications

Ryunosuke Gando^*, Haruka Kubo, Yasushi Tomizawa, Etsuji Ogawa, Shunta Maeda, Kei Masunishi, Yohei Hatakeyama, Tetsuro Itakura, Tamio Ikehashi

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

5 Citations (Scopus)

Abstract

This paper presents the first intermittent free-vibration MEMS gyroscope enabled by a 'Catch-and-Release (CR)' drive mechanism, which realizes substantial power reduction and fast startup compared to existing stationary gyroscopes. In this architecture, the proof mass is captured at the maximum displacement position (catch-state), and then released to free vibration during which the Coriolis detection is performed (release-state). Thanks to the high quality factor (Q) of 72000, the released mass can be re-captured before attenuation. This CR mechanism enables instant startup and low power. The functionality and sensitivity (21.2 μV/dps) of a prototype CR gyroscope (CR-G) are confirmed by experiments.

Original language	English
Title of host publication	2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	29-32
Number of pages	4
ISBN (Electronic)	9781509050789
DOIs	https://doi.org/10.1109/MEMSYS.2017.7863331
Publication status	Published - 2017 Feb 23
Externally published	Yes
Event	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States Duration: 2017 Jan 22 → 2017 Jan 26

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Country/Territory	United States
City	Las Vegas
Period	17/1/22 → 17/1/26

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2017.7863331

Cite this

Gando, R., Kubo, H., Tomizawa, Y., Ogawa, E., Maeda, S., Masunishi, K., Hatakeyama, Y., Itakura, T., & Ikehashi, T. (2017). An intermittent free-vibration MEMS gyroscope enabled by catch-and-release mechanism for low-power and fast-startup applications. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 29-32). Article 7863331 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863331

An intermittent free-vibration MEMS gyroscope enabled by catch-and-release mechanism for low-power and fast-startup applications. / Gando, Ryunosuke; Kubo, Haruka; Tomizawa, Yasushi et al.
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 29-32 7863331 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Gando, R, Kubo, H, Tomizawa, Y, Ogawa, E, Maeda, S, Masunishi, K, Hatakeyama, Y, Itakura, T & Ikehashi, T 2017, An intermittent free-vibration MEMS gyroscope enabled by catch-and-release mechanism for low-power and fast-startup applications. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863331, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 29-32, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, United States, 17/1/22. https://doi.org/10.1109/MEMSYS.2017.7863331

Gando R, Kubo H, Tomizawa Y, Ogawa E, Maeda S, Masunishi K et al. An intermittent free-vibration MEMS gyroscope enabled by catch-and-release mechanism for low-power and fast-startup applications. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 29-32. 7863331. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2017.7863331

Gando, Ryunosuke ; Kubo, Haruka ; Tomizawa, Yasushi et al. / An intermittent free-vibration MEMS gyroscope enabled by catch-and-release mechanism for low-power and fast-startup applications. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 29-32 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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abstract = "This paper presents the first intermittent free-vibration MEMS gyroscope enabled by a 'Catch-and-Release (CR)' drive mechanism, which realizes substantial power reduction and fast startup compared to existing stationary gyroscopes. In this architecture, the proof mass is captured at the maximum displacement position (catch-state), and then released to free vibration during which the Coriolis detection is performed (release-state). Thanks to the high quality factor (Q) of 72000, the released mass can be re-captured before attenuation. This CR mechanism enables instant startup and low power. The functionality and sensitivity (21.2 μV/dps) of a prototype CR gyroscope (CR-G) are confirmed by experiments.",

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AU - Maeda, Shunta

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AU - Hatakeyama, Yohei

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An intermittent free-vibration MEMS gyroscope enabled by catch-and-release mechanism for low-power and fast-startup applications

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