Abstract
An ionization gauge with a cold electron source has been constructed, and its performance has been evaluated. The Spindt emitter used as the cold source has shown the stable emission current of 1 mA, and the low outgas condition has been obtained after the long operation of 1 mA emission for approximately 1 month. Between the cold and hot electron sources, no large difference concerning the stability of the emission and the outgas has been detected in extremely high vacuum of 1 × 10-10 Pa, and the sensitivity of the gauge with the cold electron source (1.9×1010 cps Pa-1 at 0.1 mA reduced for nitrogen gas) was slightly higher than that of the gauge with the hot electron source.
| Original language | English |
|---|---|
| Pages (from-to) | 595-597 |
| Number of pages | 3 |
| Journal | Vacuum |
| Volume | 44 |
| Issue number | 5-7 |
| DOIs | |
| Publication status | Published - 1993 |
ASJC Scopus subject areas
- Surfaces, Coatings and Films
- Condensed Matter Physics
- Surfaces and Interfaces