TY - GEN
T1 - An RF-MEMS tunable capacitor using quadruple series capacitor structure and brittle material springs
AU - Yamazaki, Hiroaki
AU - Ikehashi, Tamio
AU - Saito, Tomohiro
AU - Ogawa, Etsuji
AU - Masunaga, Takayuki
AU - Masunishi, Kei
AU - Tomizawa, Yasushi
AU - Ohguro, Tatsuya
AU - Sugizaki, Yoshiaki
AU - Shibata, Hideki
PY - 2010/12/1
Y1 - 2010/12/1
N2 - In this paper, we show an RF-MEMS tunable capacitor that achieves excellent creep immunity and high power-handling capability. The tunable capacitor has a quadruple series capacitor (QSC) structure. The measured result demonstrates +36dBm hot-switching at 85°C with 21V pull-in voltage. The creep immunity is attained by employing SiN spring at the stress concentrations. Compared with aluminum springs, the creep deformation is reduced by a factor of 23 at 100°C.
AB - In this paper, we show an RF-MEMS tunable capacitor that achieves excellent creep immunity and high power-handling capability. The tunable capacitor has a quadruple series capacitor (QSC) structure. The measured result demonstrates +36dBm hot-switching at 85°C with 21V pull-in voltage. The creep immunity is attained by employing SiN spring at the stress concentrations. Compared with aluminum springs, the creep deformation is reduced by a factor of 23 at 100°C.
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M3 - Conference contribution
AN - SCOPUS:79957668757
SN - 9781617822810
T3 - Advanced Metallization Conference (AMC)
SP - 203
EP - 204
BT - Advanced Metallization Conference 2010
T2 - Advanced Metallization Conference 2010
Y2 - 5 October 2010 through 7 October 2010
ER -