An RF MEMS variable capacitor with intelligent bipolar actuation

Tamio Ikehashi, Takayuki Miyazaki, Hiroaki Yamazaki, Atsushi Suzuki, Etsuji Ogawa, Shinji Miyano, Tomohiro Saito, Tatsuya Ohgura, Takeshi Miyagi, Yoshiaki Sugizaki, Nobuaki Otsuka, Hideki Shibata, Yoshiaki Toyoshima*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

22 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds