TY - GEN
T1 - An RFMEMS based reflection type C-Ku band tunable band pass filter
AU - Lee, S. S.
AU - Nishino, T.
AU - Kitsukawa, Y.
AU - Konno, N.
AU - Miyazaki, M.
PY - 2009
Y1 - 2009
N2 - In this paper, we present a novel band reflection type C-Ku band tunable band pass filter (BPF), which has been developed by surface micromachining technology for wireless applications. Our BPF consists of two identical band rejection filters (BRF) and a coplanar waveguide (CPW) 90-degree hybrid coupler. The BRF is composed of metal contact type RFMEMS switches, inductors and capacitors. In the fabrication, a sacrificial layer is applied to not only RFMEMS switch but also inductor, capacitor and CPW 90-degree hybrid coupler to form air bridge, short avoidable structure and enhanced capacitive coupling, respectively. Each tuning state in C- to Ku-band is achieved by RFMEMS switch operation, which selects adequate capacitors or inductors designed corresponding to each tuning state. The insertion losses of the BPF were 3.2dB, 3.6dB and 3.5dB at 8GHz, 12GHz and 16GHz, respectively.
AB - In this paper, we present a novel band reflection type C-Ku band tunable band pass filter (BPF), which has been developed by surface micromachining technology for wireless applications. Our BPF consists of two identical band rejection filters (BRF) and a coplanar waveguide (CPW) 90-degree hybrid coupler. The BRF is composed of metal contact type RFMEMS switches, inductors and capacitors. In the fabrication, a sacrificial layer is applied to not only RFMEMS switch but also inductor, capacitor and CPW 90-degree hybrid coupler to form air bridge, short avoidable structure and enhanced capacitive coupling, respectively. Each tuning state in C- to Ku-band is achieved by RFMEMS switch operation, which selects adequate capacitors or inductors designed corresponding to each tuning state. The insertion losses of the BPF were 3.2dB, 3.6dB and 3.5dB at 8GHz, 12GHz and 16GHz, respectively.
KW - Band rejection filter
KW - CPW hybrid coupler
KW - RFMEMS switch
KW - Tunable band pass filter
UR - http://www.scopus.com/inward/record.url?scp=71449122189&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=71449122189&partnerID=8YFLogxK
U2 - 10.1109/SENSOR.2009.5285650
DO - 10.1109/SENSOR.2009.5285650
M3 - Conference contribution
AN - SCOPUS:71449122189
SN - 9781424441938
T3 - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 777
EP - 780
BT - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
T2 - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Y2 - 21 June 2009 through 25 June 2009
ER -