An RFMEMS switched capacitor array for a tunable band pass filter

S. S. Lee; H. Uchida; S. Soda; T. Nishino; H. Inoue; S. Izuo; Y. Yoshida; M. Miyazaki

doi:10.1109/SENSOR.2007.4300095

An RFMEMS switched capacitor array for a tunable band pass filter

S. S. Lee^*, H. Uchida, S. Soda, T. Nishino, H. Inoue, S. Izuo, Y. Yoshida, M. Miyazaki

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

8 Citations (Scopus)

Abstract

In this paper, we present an RFMEMS switched capacitor array, which is proposed as a RF component to achieve various kinds of tunable RF filters. Our RFMEMS switched capacitor array consists of RFMEMS direct contact switches and metal-insulator-metal capacitors. In order to obtain reliable capacitors, the metal sacrificial layer for the RFMEMS switch fabrication is also applied to the capacitor implementation. We have achieved a C- to Ku-band tunable band pass filter by using the RFMEMS switched capacitor array. The capacitance of capacitor is designed corresponding to each tuning state of the band pass filter, which is selected by the RFMEMS switch operation. The insertion losses of the band pass filter were 7.1dB, 4.9dB and 6.2dB at 8GHz, 12GHz and 16GHz, respectively.

Original language	English
Title of host publication	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	157-160
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2007.4300095
Publication status	Published - 2007
Externally published	Yes
Event	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France Duration: 2007 Jun 10 → 2007 Jun 14

Publication series

Name	TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference	4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Country/Territory	France
City	Lyon
Period	07/6/10 → 07/6/14

Keywords

RFMEMS switch
Reliable capacitor
Tunable band pass filter

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/SENSOR.2007.4300095

Cite this

Lee, S. S., Uchida, H., Soda, S., Nishino, T., Inoue, H., Izuo, S., Yoshida, Y., & Miyazaki, M. (2007). An RFMEMS switched capacitor array for a tunable band pass filter. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 157-160). Article 4300095 (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2007.4300095

An RFMEMS switched capacitor array for a tunable band pass filter. / Lee, S. S.; Uchida, H.; Soda, S. et al.
TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 157-160 4300095 (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Lee, SS, Uchida, H, Soda, S, Nishino, T, Inoue, H, Izuo, S, Yoshida, Y & Miyazaki, M 2007, An RFMEMS switched capacitor array for a tunable band pass filter. in TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems., 4300095, TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 157-160, 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07, Lyon, France, 07/6/10. https://doi.org/10.1109/SENSOR.2007.4300095

Lee SS, Uchida H, Soda S, Nishino T, Inoue H, Izuo S et al. An RFMEMS switched capacitor array for a tunable band pass filter. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems. 2007. p. 157-160. 4300095. (TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems). doi: 10.1109/SENSOR.2007.4300095

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abstract = "In this paper, we present an RFMEMS switched capacitor array, which is proposed as a RF component to achieve various kinds of tunable RF filters. Our RFMEMS switched capacitor array consists of RFMEMS direct contact switches and metal-insulator-metal capacitors. In order to obtain reliable capacitors, the metal sacrificial layer for the RFMEMS switch fabrication is also applied to the capacitor implementation. We have achieved a C- to Ku-band tunable band pass filter by using the RFMEMS switched capacitor array. The capacitance of capacitor is designed corresponding to each tuning state of the band pass filter, which is selected by the RFMEMS switch operation. The insertion losses of the band pass filter were 7.1dB, 4.9dB and 6.2dB at 8GHz, 12GHz and 16GHz, respectively.",

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AU - Lee, S. S.

AU - Uchida, H.

AU - Soda, S.

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AU - Izuo, S.

AU - Yoshida, Y.

AU - Miyazaki, M.

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AB - In this paper, we present an RFMEMS switched capacitor array, which is proposed as a RF component to achieve various kinds of tunable RF filters. Our RFMEMS switched capacitor array consists of RFMEMS direct contact switches and metal-insulator-metal capacitors. In order to obtain reliable capacitors, the metal sacrificial layer for the RFMEMS switch fabrication is also applied to the capacitor implementation. We have achieved a C- to Ku-band tunable band pass filter by using the RFMEMS switched capacitor array. The capacitance of capacitor is designed corresponding to each tuning state of the band pass filter, which is selected by the RFMEMS switch operation. The insertion losses of the band pass filter were 7.1dB, 4.9dB and 6.2dB at 8GHz, 12GHz and 16GHz, respectively.

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An RFMEMS switched capacitor array for a tunable band pass filter

Abstract

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Conference

Keywords

ASJC Scopus subject areas

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