Anti-sticking curing of fluorinated polymers for improvement of mold releasability

Jun Mizuno*, Lingyi Li, Yasuhide Kawaguchi, Kentaro Tsunozaki, Hidetoshi Shinohara, Shuichi Shoji

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)


This paper describes a post-UV curing process, called anti-sticking curing process (ACP), for fluorinated polymer (NIF) molds. After fabrication by UV imprinting, an NIF mold was irradiated by a strong UV light. The results of surface free-energy calculations, X-ray photoelectron spectroscopy (XPS), and Vickers hardness measurements showed that the surface state of NIF can be described as follows: active functional groups in the photosensitive radical initiator remained on the surface of the NIF mold after UV imprinting. After ACP, these active groups were consumed by further UV polymerization, and the fluorinated components moved to the surface. Thus, an improvement in the releasability of NIF molds is expected.

Original languageEnglish
Pages (from-to)89-93
Number of pages5
JournalJournal of Photopolymer Science and Technology
Issue number1
Publication statusPublished - 2011


  • Fluorinated polymer
  • Mold releasability
  • Pattern shrinkage
  • Post-curing process

ASJC Scopus subject areas

  • Polymers and Plastics
  • Organic Chemistry
  • Materials Chemistry


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