Apparatus for Absolute Measurements of Helium Re-emission

Toshiji Nishijima, Naoto Kobayashi

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


An experimental system for the absolute measurements of He re-emission has been constructed. It mainly consists of a quadrupole mass spectrometer and specimen annealing equipments which connect to a 300 keV ion beam accelerator, and its operation can be controlled by a computer. Its constitution and performances, and examples of experimental results are reported. For the purpose of investigating the factors which inhibit blister formation or promote gas re-emission. He re-emission from single crystals and alloys has been measured during specimen annealing after irradiation with 100 keVe+ ion beam. By using an electron gun heater, a specimen can be annealed from room temperature to 2,000K at a stepwise rate of 50 K/min. Almost all of the implanted helium can be detected over the fluences of 2 X 1013 to 1 X 1017 ions/cm2.

Original languageEnglish
Pages (from-to)259-265
Number of pages7
JournalShinku/Journal of the Vacuum Society of Japan
Issue number3
Publication statusPublished - 1983
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering


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