Abstract
An experimental system for the absolute measurements of He re-emission has been constructed. It mainly consists of a quadrupole mass spectrometer and specimen annealing equipments which connect to a 300 keV ion beam accelerator, and its operation can be controlled by a computer. Its constitution and performances, and examples of experimental results are reported. For the purpose of investigating the factors which inhibit blister formation or promote gas re-emission. He re-emission from single crystals and alloys has been measured during specimen annealing after irradiation with 100 keVe+ ion beam. By using an electron gun heater, a specimen can be annealed from room temperature to 2,000K at a stepwise rate of 50 K/min. Almost all of the implanted helium can be detected over the fluences of 2 X 1013 to 1 X 1017 ions/cm2.
| Original language | English |
|---|---|
| Pages (from-to) | 259-265 |
| Number of pages | 7 |
| Journal | Shinku/Journal of the Vacuum Society of Japan |
| Volume | 26 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 1983 |
| Externally published | Yes |
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering