Application of electronic devices for aerosol deposition methods

Masafumi Nakada*, Toshihiro Kawakami, Mizuki Iwanami, Keishi Ohashi

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)


Oxide materials have superior functional characteristics that are attributed to their versatile structures and chemically stable characteristics. These characteristics are expected to enable their employment as the functional device materials that are required to support the ubiquitous society. The aerosol deposition method is a nanocrystalline film forming method that employs the impact solidification phenomenon of ultra fine particles. This method enables the formation of oxide films onto any type of substrate. NEC and NEC TOKIN are co-developing piezoelectric and optical device products to be used in the aerosol deposition.

Original languageEnglish
Pages (from-to)76-80
Number of pages5
JournalNEC Technical Journal
Issue number1
Publication statusPublished - 2007 Dec 1
Externally publishedYes


  • Aerosol deposition
  • Electric field sensor
  • Fiber sensor
  • Film forming technology
  • Optical modulator
  • Piezoelectric device

ASJC Scopus subject areas

  • Information Systems
  • General Materials Science
  • Hardware and Architecture
  • Electrical and Electronic Engineering


Dive into the research topics of 'Application of electronic devices for aerosol deposition methods'. Together they form a unique fingerprint.

Cite this