The ozone oxidized surface was assessed via AFM observation. It was found that the step-terrace structure of the clean flat Si (001) is replicated on the surface of the ozone oxides. Conformal oxide layers from 1 monolayer to 1 nm thick with atomic steps and terraces were successfully fabricated. The AFM images of the ozone oxide surface preserved the step and terrace structures.
|Number of pages
|Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
|Published - 2001 Mar
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering