Backscattering correction factor for AuCu alloys in quantitative Auger analysis

Ding Ze‐jun; Ryuichi Shimizu; Shingo Ichimura

doi:10.1002/sia.740100506

Backscattering correction factor for AuCu alloys in quantitative Auger analysis

Ding Ze‐jun^*, Ryuichi Shimizu, Shingo Ichimura

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Abstract

The backscattering factor R, which corrects matrix effects in quantitative AES analysis, was obtained from Monte Carlo calculations for the AuCu alloy system being proposed as test standard samples for quantitative surface chemical analysis. The Monte Carlo algorithm is based on the combined use of the Gryzinski's excitation function with the Bethe's stopping power for inelastic scattering and elastic scattering cross section obtained by partial wave expansion method. The calculation of R for 5 keV and 10 keV electrons at angles of incidence 0° and 45° lead to the functional representation R(Z, U) = A(Z)U^B(Z) + C(Z), where Z is the mean atomic number of the sample and U the ratio of the primary energy to the binding energy. This representation describes the calculated R values within the maximum error 2%.

Original language	English
Pages (from-to)	253-258
Number of pages	6
Journal	Surface and Interface Analysis
Volume	10
Issue number	5
DOIs	https://doi.org/10.1002/sia.740100506
Publication status	Published - 1987 Jun
Externally published	Yes

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

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title = "Backscattering correction factor for AuCu alloys in quantitative Auger analysis",

abstract = "The backscattering factor R, which corrects matrix effects in quantitative AES analysis, was obtained from Monte Carlo calculations for the AuCu alloy system being proposed as test standard samples for quantitative surface chemical analysis. The Monte Carlo algorithm is based on the combined use of the Gryzinski's excitation function with the Bethe's stopping power for inelastic scattering and elastic scattering cross section obtained by partial wave expansion method. The calculation of R for 5 keV and 10 keV electrons at angles of incidence 0° and 45° lead to the functional representation R(Z, U) = A(Z)UB(Z) + C(Z), where Z is the mean atomic number of the sample and U the ratio of the primary energy to the binding energy. This representation describes the calculated R values within the maximum error 2%.",

author = "Ding Ze‐jun and Ryuichi Shimizu and Shingo Ichimura",

year = "1987",

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journal = "Surface and Interface Analysis",

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T1 - Backscattering correction factor for AuCu alloys in quantitative Auger analysis

AU - Ze‐jun, Ding

AU - Shimizu, Ryuichi

AU - Ichimura, Shingo

PY - 1987/6

Y1 - 1987/6

N2 - The backscattering factor R, which corrects matrix effects in quantitative AES analysis, was obtained from Monte Carlo calculations for the AuCu alloy system being proposed as test standard samples for quantitative surface chemical analysis. The Monte Carlo algorithm is based on the combined use of the Gryzinski's excitation function with the Bethe's stopping power for inelastic scattering and elastic scattering cross section obtained by partial wave expansion method. The calculation of R for 5 keV and 10 keV electrons at angles of incidence 0° and 45° lead to the functional representation R(Z, U) = A(Z)UB(Z) + C(Z), where Z is the mean atomic number of the sample and U the ratio of the primary energy to the binding energy. This representation describes the calculated R values within the maximum error 2%.

AB - The backscattering factor R, which corrects matrix effects in quantitative AES analysis, was obtained from Monte Carlo calculations for the AuCu alloy system being proposed as test standard samples for quantitative surface chemical analysis. The Monte Carlo algorithm is based on the combined use of the Gryzinski's excitation function with the Bethe's stopping power for inelastic scattering and elastic scattering cross section obtained by partial wave expansion method. The calculation of R for 5 keV and 10 keV electrons at angles of incidence 0° and 45° lead to the functional representation R(Z, U) = A(Z)UB(Z) + C(Z), where Z is the mean atomic number of the sample and U the ratio of the primary energy to the binding energy. This representation describes the calculated R values within the maximum error 2%.

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JO - Surface and Interface Analysis

JF - Surface and Interface Analysis

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Backscattering correction factor for AuCu alloys in quantitative Auger analysis

Abstract

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