Abstract
Backscattering factors for quantitative Auger analysis which were obtained by Monte Carlo calculations were analytically represented by using simple functions. This should enable the backscattering correction procedure in quantitative Auger analysis to be of more practical use.
Original language | English |
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Pages (from-to) | L49-L54 |
Journal | Surface Science |
Volume | 124 |
Issue number | 2-3 |
DOIs | |
Publication status | Published - 1983 Jan 2 |
Externally published | Yes |
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry