Biochip applications of DLC films on a resin material

Satoshi Murata*, Shin Ito, Jun Mizuno, Kenji Hirakuri, Hitoshi Sakamoto, Sadaaki Masuko, Keisuke Sato, Naoki Fukata, Fukuo Shizuku, Shuichi Shoji

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


Recent studies of diamond-like carbon (DLC) coated medical devices have indicated possibility for developing biochip applications. We have deposited DLC film on cyclo-olefin polymer (COP) sheet by using radio frequency plasma chemical vapor deposition technique. To enhance the adhesion strength between the COP sheet and the DLC films, the COP surface was modified by oxygen (O 2) or nitrogen (N 2) plasma treatment before the film coating. The critical load of samples was measured by using a scratch test. The result showed the adhesion strength of films was improved by the plasma treatment. After the DLC film coating, we performed the plasma post-treatment of O 2, N 2 or hexafluoroethane (C 2F 6) gases to control the wettability of the material surface. The wettability, structure, roughness, and chemical composition of the samples have been investigated by a contact angle measurement, Raman spectroscopy (Raman), atomic force microscopy (AFM), and X-ray photoelectron spectroscopy (XPS). These measurements indicated that wettability on the surface condition of DLC films was easily controlled by plasma post-treatment of O 2, N 2 and C 2F 6. Furthermore, results of XPS showed that wettability of the surface condition is strongly dependent on chemical components with existemce of oxygen, nitrogen and flourine. We have estimated the wettability of hydorphilicity and hydrophobicity on DLC coating under plasma post-treatment for biochip applications.

Original languageEnglish
Pages (from-to)1439-1442
Number of pages4
JournalPhysica Status Solidi (C) Current Topics in Solid State Physics
Issue number6
Publication statusPublished - 2012 Jun
Externally publishedYes


  • Cyclo-olefin polymer (COP)
  • Diamond-like carbon (DLC)
  • Surface treatments
  • Wettability

ASJC Scopus subject areas

  • Condensed Matter Physics


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