C-axis parallel oriented ZnO film SH-SAW sensor for electrical conductivity measurement in liquid

Yuta Nakahigashi; Takahiko Yanagitani; Mami Matsukawa; Yoshiaki Watanabe

doi:10.1109/ULTSYM.2011.0198

C-axis parallel oriented ZnO film SH-SAW sensor for electrical conductivity measurement in liquid

Yuta Nakahigashi^*, Takahiko Yanagitani, Mami Matsukawa, Yoshiaki Watanabe

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

A shear horizontal type surface acoustic wave (SH-SAW) device can be a sensor operating in liquid, because SH-SAW propagates at liquid/solid interface without energy leakage to liquid. This device can detect changes in conductivity and viscosity of liquid. c-axis parallel oriented ZnO film can be one of the best candidates for the SH-SAW liquid sensor on various substrates. Theoretical investigation of K ² value in IDT / ZnO (0°, 90°, ψ) film / silica glass substrate structure showed that maximum value of K ² = 3.4 % was found at ψ = 55° with H / λ = 0.21. In this study, we fabricated these structures and evaluated K ² values. Finally, the electrical conductivity of liquid was detected as the velocity change.

Original language	English
Title of host publication	2011 IEEE International Ultrasonics Symposium, IUS 2011
Pages	810-813
Number of pages	4
DOIs	https://doi.org/10.1109/ULTSYM.2011.0198
Publication status	Published - 2011 Dec 1
Externally published	Yes
Event	2011 IEEE International Ultrasonics Symposium, IUS 2011 - Orlando, FL, United States Duration: 2011 Oct 18 → 2011 Oct 21

Publication series

Name	IEEE International Ultrasonics Symposium, IUS
ISSN (Print)	1948-5719
ISSN (Electronic)	1948-5727

Other

Other	2011 IEEE International Ultrasonics Symposium, IUS 2011
Country/Territory	United States
City	Orlando, FL
Period	11/10/18 → 11/10/21

Keywords

SH-SAW
c-axis parallel oriented ZnO film
sensor

ASJC Scopus subject areas

Acoustics and Ultrasonics

Access to Document

10.1109/ULTSYM.2011.0198

Cite this

C-axis parallel oriented ZnO film SH-SAW sensor for electrical conductivity measurement in liquid. / Nakahigashi, Yuta; Yanagitani, Takahiko; Matsukawa, Mami et al.
2011 IEEE International Ultrasonics Symposium, IUS 2011. 2011. p. 810-813 6293741 (IEEE International Ultrasonics Symposium, IUS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nakahigashi, Y, Yanagitani, T, Matsukawa, M & Watanabe, Y 2011, C-axis parallel oriented ZnO film SH-SAW sensor for electrical conductivity measurement in liquid. in 2011 IEEE International Ultrasonics Symposium, IUS 2011., 6293741, IEEE International Ultrasonics Symposium, IUS, pp. 810-813, 2011 IEEE International Ultrasonics Symposium, IUS 2011, Orlando, FL, United States, 11/10/18. https://doi.org/10.1109/ULTSYM.2011.0198

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title = "C-axis parallel oriented ZnO film SH-SAW sensor for electrical conductivity measurement in liquid",

abstract = "A shear horizontal type surface acoustic wave (SH-SAW) device can be a sensor operating in liquid, because SH-SAW propagates at liquid/solid interface without energy leakage to liquid. This device can detect changes in conductivity and viscosity of liquid. c-axis parallel oriented ZnO film can be one of the best candidates for the SH-SAW liquid sensor on various substrates. Theoretical investigation of K 2 value in IDT / ZnO (0°, 90°, ψ) film / silica glass substrate structure showed that maximum value of K 2 = 3.4 % was found at ψ = 55° with H / λ = 0.21. In this study, we fabricated these structures and evaluated K 2 values. Finally, the electrical conductivity of liquid was detected as the velocity change.",

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PY - 2011/12/1

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N2 - A shear horizontal type surface acoustic wave (SH-SAW) device can be a sensor operating in liquid, because SH-SAW propagates at liquid/solid interface without energy leakage to liquid. This device can detect changes in conductivity and viscosity of liquid. c-axis parallel oriented ZnO film can be one of the best candidates for the SH-SAW liquid sensor on various substrates. Theoretical investigation of K 2 value in IDT / ZnO (0°, 90°, ψ) film / silica glass substrate structure showed that maximum value of K 2 = 3.4 % was found at ψ = 55° with H / λ = 0.21. In this study, we fabricated these structures and evaluated K 2 values. Finally, the electrical conductivity of liquid was detected as the velocity change.

AB - A shear horizontal type surface acoustic wave (SH-SAW) device can be a sensor operating in liquid, because SH-SAW propagates at liquid/solid interface without energy leakage to liquid. This device can detect changes in conductivity and viscosity of liquid. c-axis parallel oriented ZnO film can be one of the best candidates for the SH-SAW liquid sensor on various substrates. Theoretical investigation of K 2 value in IDT / ZnO (0°, 90°, ψ) film / silica glass substrate structure showed that maximum value of K 2 = 3.4 % was found at ψ = 55° with H / λ = 0.21. In this study, we fabricated these structures and evaluated K 2 values. Finally, the electrical conductivity of liquid was detected as the velocity change.

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KW - c-axis parallel oriented ZnO film

KW - sensor

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C-axis parallel oriented ZnO film SH-SAW sensor for electrical conductivity measurement in liquid

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Keywords

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