TY - GEN
T1 - C-Axis zig-zag polarization inverted ScAlN multilayer for FBAR transformer rectifying antenna
AU - Karasawa, Rei
AU - Yanagitani, Takahiko
N1 - Funding Information:
This work was supported by the Japan Science and Technology Agency, PRESTO (JST, PRESTO, No. JPMJPR16R8)
Publisher Copyright:
© 2017 IEEE.
PY - 2017/10/31
Y1 - 2017/10/31
N2 - Enegy harvesting from surrounding electromagnetic wave have attracted much attention in recent years. Low RF-DC conversion efficiency in the rectenna due to a weak power of electromagnetic wave is a problem. We here report the new type of polarization inverted FBAR transformer for RF amplification in the rectenna. c-Axis zig-zag polarization inverted 12 layer ScAlN was fabricated by glancing sputtering deposition. The 12 layer ScAlN HBAR clearly excites 12th-order shear mode of 1.4 dB at 612 MHz. c-Axis tilt angle of the layers was determined to be 40-45 degrees by an XRD pole figure. This new type of device is promising for high efficiency RF-DC conversion in the rectenna.
AB - Enegy harvesting from surrounding electromagnetic wave have attracted much attention in recent years. Low RF-DC conversion efficiency in the rectenna due to a weak power of electromagnetic wave is a problem. We here report the new type of polarization inverted FBAR transformer for RF amplification in the rectenna. c-Axis zig-zag polarization inverted 12 layer ScAlN was fabricated by glancing sputtering deposition. The 12 layer ScAlN HBAR clearly excites 12th-order shear mode of 1.4 dB at 612 MHz. c-Axis tilt angle of the layers was determined to be 40-45 degrees by an XRD pole figure. This new type of device is promising for high efficiency RF-DC conversion in the rectenna.
KW - C-axis tilted films
KW - Porarization inverted multilayer films
KW - Rectenna
KW - ScAlN
KW - Shear mode
UR - http://www.scopus.com/inward/record.url?scp=85039449370&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85039449370&partnerID=8YFLogxK
U2 - 10.1109/ULTSYM.2017.8091618
DO - 10.1109/ULTSYM.2017.8091618
M3 - Conference contribution
AN - SCOPUS:85039449370
T3 - IEEE International Ultrasonics Symposium, IUS
BT - 2017 IEEE International Ultrasonics Symposium, IUS 2017
PB - IEEE Computer Society
T2 - 2017 IEEE International Ultrasonics Symposium, IUS 2017
Y2 - 6 September 2017 through 9 September 2017
ER -