Capacitive absolute pressure sensors with hybrid structure

Masayosi Esashi*, Shuichi Shoji, Toshitada Wada, Tomio Nagata

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Fingerprint

Dive into the research topics of 'Capacitive absolute pressure sensors with hybrid structure'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science