Carbon nanotube forests as top electrode in electroacoustic resonators

Santiago Esconjauregui*, Taron Makaryan, Teona Mirea, Mario DeMiguel-Ramos, Jimena Olivares, Yuzheng Guo, Hisashi Sugime, Lorenzo D'Arsié, Junwei Yang, Sunil Bhardwaj, Cinzia Cepek, John Robertson, Enrique Iborra

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)


We grow carbon nanotube forests on piezoelectric AlN films and fabricate and characterize nanotube-based solidly mounted bulk acoustic wave resonators employing the forests as the top electrode material. The devices show values for quality factor at anti-resonance of ∼430, and at resonance of ∼100. The effective coupling coefficient is of ∼6%, and the resonant frequencies are up to ∼800 MHz above those observed with metallic top electrodes. AlN promotes a strong catalyst-support interaction, which reduces Fe catalyst mobility, and thus enforces the growth of forests by the base growth mechanism.

Original languageEnglish
Article number133106
JournalApplied Physics Letters
Issue number13
Publication statusPublished - 2015 Sept 28
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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