TY - JOUR
T1 - Carbon nanotube forests as top electrode in electroacoustic resonators
AU - Esconjauregui, Santiago
AU - Makaryan, Taron
AU - Mirea, Teona
AU - DeMiguel-Ramos, Mario
AU - Olivares, Jimena
AU - Guo, Yuzheng
AU - Sugime, Hisashi
AU - D'Arsié, Lorenzo
AU - Yang, Junwei
AU - Bhardwaj, Sunil
AU - Cepek, Cinzia
AU - Robertson, John
AU - Iborra, Enrique
N1 - Publisher Copyright:
© 2015 AIP Publishing LLC.
PY - 2015/9/28
Y1 - 2015/9/28
N2 - We grow carbon nanotube forests on piezoelectric AlN films and fabricate and characterize nanotube-based solidly mounted bulk acoustic wave resonators employing the forests as the top electrode material. The devices show values for quality factor at anti-resonance of ∼430, and at resonance of ∼100. The effective coupling coefficient is of ∼6%, and the resonant frequencies are up to ∼800 MHz above those observed with metallic top electrodes. AlN promotes a strong catalyst-support interaction, which reduces Fe catalyst mobility, and thus enforces the growth of forests by the base growth mechanism.
AB - We grow carbon nanotube forests on piezoelectric AlN films and fabricate and characterize nanotube-based solidly mounted bulk acoustic wave resonators employing the forests as the top electrode material. The devices show values for quality factor at anti-resonance of ∼430, and at resonance of ∼100. The effective coupling coefficient is of ∼6%, and the resonant frequencies are up to ∼800 MHz above those observed with metallic top electrodes. AlN promotes a strong catalyst-support interaction, which reduces Fe catalyst mobility, and thus enforces the growth of forests by the base growth mechanism.
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U2 - 10.1063/1.4932197
DO - 10.1063/1.4932197
M3 - Article
AN - SCOPUS:84942935971
SN - 0003-6951
VL - 107
JO - Applied Physics Letters
JF - Applied Physics Letters
IS - 13
M1 - 133106
ER -