TY - JOUR
T1 - Characteristics of (101̄0) and (112̄0) textured ZnO piezofilms for a shear mode resonator in the VHF-UHF frequency ranges
AU - Yanagitani, Takahiko
AU - Nohara, Takuya
AU - Matsukawa, Mami
AU - Watanabe, Yoshiaki
AU - Otani, Takahiko
N1 - Funding Information:
The authors thank Dr. K. Hashimoto of Chiba University for helpful discussions. This work was partly supported by the Grants-in-Aid for Scientific Research from the Japan Society for the Promotion of Science and the Aid of Grant of Doshisha University’s Research Promotion Fund.
PY - 2005/11
Y1 - 2005/11
N2 - This paper reports the fabrication and characterization of ZnO piezoelectric thin films in which the crystallite c-axis is unldirectionally aligned in the plane. The films were deposited by a conventional radio frequency (RF) magnetron sputtering apparatus without epitaxy. We have measured reflection coefficient S11 of the ZnO film/glass substrate composite shear mode resonator and confirmed that the resonator excites shear wave only in the very high frequency to ultra high frequency ranges (VHF-UHF). The crystallites c-axis orientation and alignment were determined by x-ray diffraction (XRD) patterns, phi;-scan pole figure analysis, ω-scan rocking curves, and atomic force microscope (AFM) measurement. The transduction of the shear wave showed good agreement with properties of the crystallite alignment in the film.
AB - This paper reports the fabrication and characterization of ZnO piezoelectric thin films in which the crystallite c-axis is unldirectionally aligned in the plane. The films were deposited by a conventional radio frequency (RF) magnetron sputtering apparatus without epitaxy. We have measured reflection coefficient S11 of the ZnO film/glass substrate composite shear mode resonator and confirmed that the resonator excites shear wave only in the very high frequency to ultra high frequency ranges (VHF-UHF). The crystallites c-axis orientation and alignment were determined by x-ray diffraction (XRD) patterns, phi;-scan pole figure analysis, ω-scan rocking curves, and atomic force microscope (AFM) measurement. The transduction of the shear wave showed good agreement with properties of the crystallite alignment in the film.
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U2 - 10.1109/TUFFC.2005.1561685
DO - 10.1109/TUFFC.2005.1561685
M3 - Article
C2 - 16422428
AN - SCOPUS:29144506296
SN - 0885-3010
VL - 52
SP - 2140
EP - 2145
JO - Transactions of the IRE Professional Group on Ultrasonic Engineering
JF - Transactions of the IRE Professional Group on Ultrasonic Engineering
IS - 11
ER -