Characteristics of (101̄0) and (112̄0) textured ZnO piezofilms for a shear mode resonator in the VHF-UHF frequency ranges

Takahiko Yanagitani*, Takuya Nohara, Mami Matsukawa, Yoshiaki Watanabe, Takahiko Otani

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

29 Citations (Scopus)


This paper reports the fabrication and characterization of ZnO piezoelectric thin films in which the crystallite c-axis is unldirectionally aligned in the plane. The films were deposited by a conventional radio frequency (RF) magnetron sputtering apparatus without epitaxy. We have measured reflection coefficient S11 of the ZnO film/glass substrate composite shear mode resonator and confirmed that the resonator excites shear wave only in the very high frequency to ultra high frequency ranges (VHF-UHF). The crystallites c-axis orientation and alignment were determined by x-ray diffraction (XRD) patterns, phi;-scan pole figure analysis, ω-scan rocking curves, and atomic force microscope (AFM) measurement. The transduction of the shear wave showed good agreement with properties of the crystallite alignment in the film.

Original languageEnglish
Pages (from-to)2140-2145
Number of pages6
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Issue number11
Publication statusPublished - 2005 Nov
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering


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