Characteristics of residual gases in an extreme-high vacuum system

K. Kokubun*, H. Shimizu, S. Ichimura

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


Residual gases in an extreme-high vacuum (XHV) system are measured at each pumping step. On the basis of the analysis, the pumping capacity of each vacuum pump is estimated. As a result, it is found that, in the case of a liquid N2-cooled shroud, the titanium-sublimation pump has a high capacity for evacuating of Ch4 and Ar as well as H2 gas, and a pumping system which consists of two turbo molecular pumps and a rotary pump has a pumping capacity for almost all gases in the region of ultra high vacuum, but loses the capacity for H2 gas in the XHV region.

Original languageEnglish
Pages (from-to)38-44
Number of pages7
JournalDenshi Gijutsu Sogo Kenkyusho Iho/Bulletin of the Electrotechnical Laboratory
Issue number4
Publication statusPublished - 1993
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering


Dive into the research topics of 'Characteristics of residual gases in an extreme-high vacuum system'. Together they form a unique fingerprint.

Cite this