Characteristics of Ti films for transition-edge sensor microcalorimeters

M. Ukibe*, M. Koyanagi, M. Ohkubo, H. Pressler, Naoto Kobayashi

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)


We are developing X-ray microcalorimeters using superconducting transition-edge sensors (TESs), which can be operated at relatively high base temperatures of a 3He cryostat. For this purpose, we have selected Ti films to be used as TESs. The Ti films were deposited on different substrates by RF-sputtering. It was found that the superconducting properties of the Ti films depended on Ar pressure, film thickness, and substrate surface roughness.

Original languageEnglish
Pages (from-to)256-261
Number of pages6
JournalNuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Issue number1-2
Publication statusPublished - 1999 Oct 21
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation
  • Nuclear and High Energy Physics


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