Abstract
We characterized high-quality polycrystalline diamond with large grains and fabricated polycrystalline diamond field effect transistors (FETs). The polycrystalline diamond had (110) preferred orientation, and its typical grain size was ∼ 100 μm. Well-resolved free exciton related emissions were observed at room temperature in cathodoluminescence. The FETs showed extremely high DC and RF performance. The cut-off frequency for current gain (fT) and power gain (fmax) were 45 and 120 GHz, respectively. The maximum drain current (IDS) was 550 mA/mm. These values are the highest among diamond FETs, including those fabricated from single-crystal diamond. These results suggest that high-quality polycrystalline diamond, whose maximum size is 4 in., is very promising for diamond electronic devices.
Original language | English |
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Pages (from-to) | 1954-1957 |
Number of pages | 4 |
Journal | Diamond and Related Materials |
Volume | 15 |
Issue number | 11-12 SPEC. ISS. |
DOIs | |
Publication status | Published - 2006 Nov |
Externally published | Yes |
Keywords
- FET
- Hydrogen-terminated
- Polycrystalline diamond
- RF performance
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Mechanical Engineering
- Physics and Astronomy(all)
- Materials Chemistry
- Chemistry(all)
- Electrical and Electronic Engineering